The mechanical and structural properties of Ti films prepared by filtered arc deposition

Vacuum

Volumn 47, Issue 10, 1996, Pages 1179-1188

  Bendavid, A ^a,b   Martin, P J ^a   Smith, G B ^b   Wielunski, L ^a   Kinder, T J ^a  

^a CSIRO   (Australia)

^b UNIVERSITY OF TECHNOLOGY SYDNEY   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

FILTERED ARC DEPOSITION; TITANIUM THIN FILMS;

EXPERIMENTS; MECHANICAL PROPERTIES; RESIDUAL STRESSES; SURFACE ROUGHNESS; SURFACE STRUCTURE; TITANIUM; VAPOR DEPOSITION;

METALLIC FILMS;

EID: 0030261472     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/0042-207X(96)00192-3     Document Type: Article

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