Control the shape of buckling micromachined beam using plasma chemistry bonding technology

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 45, Issue 10 B, 2006, Pages 8479-8483

  Su, Wang Shen ^a   Lee, Sheng Ta ^a   Lin, Cheng Yu ^a   Yip, Ming Chuen ^a   Tsai, Ming Shih ^b   Fang, Weileun ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

^b NATIONAL NANO DEVICE LABORATORIES   (Taiwan)

Author keywords

Buckle; MEMS; Micro bridge; Plasma treatment; Residual stress

Indexed keywords

BUCKLING; FINITE ELEMENT METHOD; MEMS; PLASMA APPLICATIONS; RESIDUAL STRESSES;

MICRO BRIDGE; PLASMA CHEMISTRY;

MICROMACHINING;

EID: 34547856260     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.45.8479     Document Type: Article

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