Simultaneous determination of thermal conductivities of thin film and substrate by extending 3ω-method to wide-frequency range

Applied Surface Science

Volumn 253, Issue 22, 2007, Pages 9024-9029

  Wang, Zhao Liang ^a   Tang, Da Wei ^a   Zheng, Xing Hua ^a  

^a INSTITUTE OF ENGINEERING THERMOPHYSICS   (China)

Author keywords

3 Method; Critical frequency; Film substrate structure; Thermal conductivity

Indexed keywords

NATURAL FREQUENCIES; SILICA; THIN FILMS; UNCERTAINTY ANALYSIS;

CRITICAL FREQUENCY; FREQUENCY RANGE; SUBSTRATE STRUCTURE;

THERMAL CONDUCTIVITY;

EID: 34547852499     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2007.05.020     Document Type: Article

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