Atomic layer deposition for the fabrication of 3D photonic crystals structures: Growth of Al2O3 and VO2 photonic crystal systems

Surface and Coatings Technology

Volumn 201, Issue 22-23 SPEC. ISS., 2007, Pages 9345-9348

  Povey, I M ^a   Bardosova, M ^a   Chalvet, F ^a   Pemble, M E ^a   Yates, H M ^b  

^a UNIVERSITY COLLEGE CORK   (Ireland)

^b UNIVERSITY OF SALFORD   (United Kingdom)

Author keywords

ALD; Atomic layer deposition; Photonic band gap; Photonic crystals; Synthetic opals

Indexed keywords

ATOMIC LAYER DEPOSITION; INFILTRATION; MORPHOLOGY; PERMITTIVITY; PHOTONIC BAND GAP;

MONODISPERSED ASSEMBLIES; SYNTHETIC OPALS;

PHOTONIC CRYSTALS;

ATOMIC LAYER DEPOSITION; INFILTRATION; MORPHOLOGY; PERMITTIVITY; PHOTONIC BAND GAP; PHOTONIC CRYSTALS;

EID: 34547819202     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2007.04.108     Document Type: Article

References (30)

1. Yablonovitch E. Phys. Rev. Lett. 58 (1987) 2059
2. John S. Phys. Rev. Lett. 58 (1987) 2486
3. Lopez C. Adv.Mater 15 (2003) 1679
4. Busch K., and John S. Phys. Rev. E 58 (1998) 3896
5. Astratov V.N., Bogomolov V.N., Kaplyanskii A.A., Prokofiev A.V., Samoilovich L.A., Samoilovich S.M., and Vlasov Y.A. Nuovo Cimento D 17 (1985) 1349
6. Blanco, Chomski E., Grabtchak S., Ibisate M., John S., Leonard S.W., Lopez C., Meseguer F., Miguez H., Mondia J.P., Ozin G.A., Toader O., and van Driel H.M. Nature 405 (2000) 437
7. Lee Y.C., Kuo T.J., Hsu C.J., Su Y.W., and Chen C.C. Langmuir 18 (2002) 9942
8. Yates H.M., Pemble M.E., Blanco A., Miguez H., Lopez C., and Meseguer F. Chem. Vap. Depos. 6 (2000) 283
9. Yates H.M., Pemble M.E., Miguez H., Blanco A., Lopez C., Meseguer F., and Vazquez L. J. Cryst. Growth 193 (1998) 9
10. Miguez H., Blanco A., Meseguer F., Lopez C., Yates H.M., Pemble M.E., Fornes V., and Mifsud A. Phys Rev. 59 (1999) 1563-1566
11. Yates H.M., Pemble M.E., Palacios-Lidon E., Garcia-Santamaria F., Rodriguez I., Meseguer F., and Lopez C. Adv. Funct. Mater. 15 (2005) 411-417
12. Povey I.M., Whitehead D., Thomas K., Pemble M.E., Baradosova M., and Renard J. Appl. Phys. Lett. 89 (2006) 104103
13. Sechrist Z.A., Schwartz B.T., Lee J.H., McCormick J.A., Piestun R., Park W., and George S.M. Chem. Mater. 18 (2006) 3562
14. Scharrer M., Wu X., Yamilov A., Cao H., and Chang R.P.H. Appl. Phys. Lett. 86 (2005) 151113
15. Rugge A., Becker J.S., Gordon R.G., and Tolbert S.H. Nano Lett. 3 (2003) 1293
16. King J.S., Neff C.W., Summers C.J., Park W., Blomquist S., Forsythe E., and Morton D. Appl. Phys. Lett. 83 (2003) 2566
17. King J.S., Heineman D., Graugnard E., and Summers C.J. Appl. Surf. Sci. 244 (2005) 511
18. Chunhua T., Guanghan F., Tianming Z., Shuti L., and Huiqing S. Physica B, 363 (2005) 1
19. Graugnard E., Chawla V., Lorang D., and Summers C.J. Appl. Phys. Lett. 89 (2006) 211102
20. Joannopoulos J.D., Villeneuve P.R., and Fan S. Solid State Commun. 102 (1997) 165
21. Saadeddin I., Pecquenard B., Manaud J.P., Decourt R., Labrugere C., Buffeteau T., and Campet G. Appl. Surf. Sci. (2007) 10.1016/j.apsusc.2006.11.049
22. Míguez H., Chomski E., Garcia-Santamaria F., Ibisate M., John S., Lopez C., Meseguer F., Mondia J.P., Ozin G.A., Toader O., and van Driel H.M. Adv. Mater. 13 (2001) 1634
23. Zylbersztejn A., and Mott N.F. Phys. Rev., B Condens. Mater 11 (1975) 4383
24. Stöber W., Fink A., and Bohn E. J. Colloid Interface Sci. 26 (1968) 62
25. Denkov N.D., Velev O.D., Kralchevsky P.A., Ivanov I.B., Yoshimura H., and Nagayama K. Langmuir 8 (1992) 3883
26. Bertone J.F., Jiang P., Hwang K.S., Mittleman D.M., and Colvin V.L. Phys. Rev Lett. 83 (1999) 300
27. Graugnard E., King J.S., Gaillot D.P., and Summers C.J. Adv. Funct. Mater. 16 (2006) 1187
28. Xiao D., Kim K.W., and Zavada J.M. J. Appl. Phys., 97 (2005) 106102
29. Xiao D., Kim K.W., Lazzi G., and Zavada J.M. J. Appl. Phys., 99 (2006) 113106
30. Dagur P., Mane A.U., and Shivashankar S.A. J. Cryst. Growth, 275 (2005) 1223