Wear detection of candidate MEMS/NEMS lubricant films using atomic force microscopy-based surface potential measurements

Scripta Materialia

Volumn 57, Issue 9, 2007, Pages 821-824

  Palacio, Manuel ^a   Bhushan, Bharat ^a  

^a OHIO STATE UNIVERSITY   (United States)

Author keywords

Atomic force microscopy; Lubricants; Perfluoropolyethers; Surface potential; Wear

Indexed keywords

ATOMIC FORCE MICROSCOPY; LUBRICANTS; MEMS; NEMS; POLYETHERS; SURFACE MEASUREMENT; WEAR OF MATERIALS;

LUBRICANT REPLENISHMENT; PERFLUOROPOLYETHERS; UNTREATED COATINGS;

THIN FILMS;

EID: 34547808302     PISSN: 13596462     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.scriptamat.2007.07.005     Document Type: Article

References (22)

1. Bhushan B. Tribology Issues and Opportunities in MEMS (1998), Kluwer Academic, Dordrecht
2. Bhushan B. Springer Handbook of Nanotechology. second ed. (2007), Springer-Verlag, Heidelberg
3. Henck S.A. Tribol. Lett. 3 (1997) 239-247
4. M.R. Douglass, Lifetime estimates and unique failure mechanisms of the digital micromirror device (DMD), in: Proceedings of the 36th Annual International Reliability Physics Symposium, 1998, pp. 9-16.
5. Sulouff R.E. MEMS opportunities in accelerometers and gyros and the microtribology problems limiting commercialization. In: Bhushan B. (Ed). Tribology Issues and Opportunities in MEMS (1998), Kluwer Academic, Dordrecht 109-119
6. Vettiger P., Brugger J., Dreschler M., Despont U., Durig U., Haberle W., Lutwyche M., Rothuizen H., Stuz R., Widmer R., and Binnig G. Microelectron. Eng. 46 (1999) 11-17
7. Liu H., and Bhushan B. Ultramicroscopy 97 (2003) 321-340
8. Tao Z., and Bhushan B. Wear 259 (2005) 1352-1361
9. Bhushan B., and Tao Z. Microsyst. Technol. 12 (2006) 579-587
10. Bhushan B. Tribology and Mechanics of Magnetic Storage Devices. second ed. (1996), Springer, New York
11. Bhushan B., and Zhao Z. J. Info. Storage Proc. Syst. 1 (1999) 1-21
12. Bhushan B. Handbook of Micro/Nanotribology. second ed. (1999), CRC, Boca Raton, FL
13. Bhushan B. Nanotribology and Nanomechanics - An Introduction. second ed. (2005), Springer-Verlag, Heidelberg
14. Martin Y., Abraham D.W., and Wickramasinghe H.K. Appl. Phys. Lett. 52 (1988) 1103-1105
15. Weaver J.M.R., and Abraham D.W. J. Vac. Sci. Technol. B 9 (1991) 1559-1561
16. DeVecchio D., and Bhushan B. Rev. Sci. Instrum. 69 (1998) 3618-3624
17. Bhushan B., and Goldade A.V. Wear 244 (2000) 104-117
18. Bhushan B., and Goldade A.V. Appl. Surf. Sci. 157 (2000) 373-381
19. Lodge R.A., and Bhushan B. J. Coll. Interf. Sci. 310 (2007) 321-330
20. Lodge R.A., and Bhushan B. J. Vac. Sci. Technol. A 25 (2007) 893-902
21. Kasai P.H., and Raman V. Tribol. Lett. 16 (2004) 29-36
22. Wintle H.J. J. Appl. Phys. 43 (1972) 2927-2930