Thermal and optical characterization of silicon-based tunable optical thin-film filters

Journal of Microelectromechanical Systems

Volumn 16, Issue 3, 2007, Pages 500-510

  Hohlfeld, Dennis ^a,b   Zappe, Hans ^a  

^a UNIVERSITY OF FREIBURG   (Germany)

^b IMEC NL   (Netherlands)

Author keywords

Amorphous silicon; Dielectric Bragg reflector; Fabry P rot; Stress compensation; Thermal time constant; Thermooptic effect; Tunable optical filter

Indexed keywords

AMORPHOUS SILICON; BRAGG REFLECTORS; CHARACTERIZATION; OPTICAL PROPERTIES; SEMICONDUCTING SILICON; THERMODYNAMIC PROPERTIES; THIN FILMS;

DIELECTRIC BRAGG REFLECTOR; FABRY-PEROT RESONATOR; STRESS COMPENSATION; THERMAL TIME CONSTANT; TUNABLE OPTICAL FILTER;

OPTICAL FILTERS;

EID: 34547774728     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2007.895221     Document Type: Article

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