A wide range linearly-tunable optical filter using magnetic actuation

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2004, Pages 93-96

  Lee, Hyung Kew ^a   Kim, Kyu Sang ^a   Cho, Il Joo ^a   Yoon, Euisik ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; BIOTECHNOLOGY; CORRUGATED MATERIALS; FABRICATION; MAGNETIC FIELD EFFECTS; MICROELECTROMECHANICAL DEVICES; MICROOPTICS; TUNING;

ELECTROSTATIC ACTUATION; LORENTZ FORCE; MAGNETIC ACTUATION; SPRING STRUCTURES;

OPTICAL FILTERS;

EID: 3042781643     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)

1. Carlos F. R. Mateus, Chih-Hao Chang, Lukas Chrostowski, Steven Yang, Decai Sun, Rajiv Pathak, and Connie J. Chang-Hasnain, "Widely Tunable Torsional Optical Filter", IEEE PHOTONICS TECHNOLOGY LETTERS, Vol.14, No. 6, pp. 819-821, 2002.
2. M. Aziz, J. Pfeiffer, M. Wohlfarth, C. Luber, S. Wu, and P. Meissner, "A New and Simple Concept of Tunable Two-Chip Microcavities for Filter Applications in WDM Systems", IEEE PHOTONICS TECHNOLOGY LETTERS, Vol.12, No. 11, pp. 1522-1523, 2000.
3. x Deformable Mirrors", IEEE PHOTONICS TECHNOLOGY LETTERS, Vol.10, No. 3, pp. 394-396, 1998.
4. J. Peerlings, A. Dehe, A. Vogt, M. Tilsch, C. Hebeler, F. Langenhan, P. Meissner, and H. L. Hartnagel, "Long Resonator Micromachined Tunable GaAs-ALAs Fabry-Perot Filter", IEEE PHOTONICS TECHNOLOGY LETTERS, Vol. 9, No. 9, pp. 1235-1237, 1997.
5. E. Hecht, Optics, Addison Wesley Longman, Inc., 1998.
6. A. Jourdain, P. De Moor, S. Pamidighantam, and H. A. C. Tilmans, "Investigation Of The Hermeticiry Of BCB-Sealed Cavities For Housing (RF-)MEMS Devices", in IEEE Micro Electro Mechanical Systems Technical Digest 2002, Las Vegas, January 20-24, pp. 677-680