Reducing residual vibrations through iterative learning control, with application to a wafer stage

Proceedings of the American Control Conference

Volumn 6, Issue , 2004, Pages 5150-5155

  Van Oosten, Casper L ^a   Bosgra, Okko H ^a,b   Dijkstra, Branko G ^c  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

^c MAPPER Lithography BV   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; CLOSED LOOP CONTROL SYSTEMS; COMPUTER SIMULATION; ERROR ANALYSIS; FEEDBACK CONTROL; VIBRATIONS (MECHANICAL);

FINITE TIME INTERVAL; LEARNING CONTROL; RESIDUAL VIBRATIONS; WAFER STAGE;

LEARNING SYSTEMS;

EID: 8744280139     PISSN: 07431619     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)

1. Branko G. Dijkstra and Okko H. Bosgra. Exploiting Iterative Learning Control for Input Shaping, with application to a wafer stage. American Control Conference, June 2003.
2. N.C. Singer and W.P. Seering. Preshaping command inputs to reduce systems vibration. Transactions of the ASME, Journal of Dynamic Systems, Measurement and Control, 112:76-82, 1990.
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8. Branko G. Dijkstra and Okko H. Bosgra. Extrapolation of optimal lifted system ILC solution, with application to a waferstage. American Control Conference, May 2002.
9. Branko G. Dijkstra and Okko H. Bosgra. Noise suppression in buffer-state iterative learning control, applied to a high precision wafer stage. Conference on Control Automation, September 2002.
10. Branko G. Dijkstra and Okko H. Bosgra. Convergence design considerations of low order q-ILC for closed loop systems, implemented on a high precision wafer stage. Conference on Decision and Control, December 2002.
11. Casper van Oosten. Robustness for Iterative Learning Control, with application to a wafer stage. MSc. Thesis, Delft University of Technology, December 2003.
12. Rob Tousain and Eduard Van der Meché. Design strategies for iterative learning control based on optimal control. Conference on Decision and Control, 40:4463-4468, December 2001.
13. Won Cheol Kim, In Sik Chin, Kwang Soon Lee, and Jinhoon Choi. Analysis and reduced-order design of quadratic criterion-based iterative learning control using singular value decomposition. Computers and Chemical Engineering, 24:1815-1819, 2000.