Effect of processing conditions on the microstructure and electrical resistance of nanocrystalline ITO thin films made by laser ablation

Materials Science Forum

Volumn 514-516, Issue PART 2, 2006, Pages 1161-1165

  Savu, R ^a   Joanni, E ^a,b  

^a UNIVERSITY OF PORTO   (Portugal)

^b UNIVERSITY OF TRÁS OS MONTES AND ALTO DOURO   (Portugal)

Author keywords

Electrical resistance; ITO; Laser ablation; Porosity; Thin films

Indexed keywords

ELECTRIC RESISTANCE; GROWTH RATE; INDIUM COMPOUNDS; LASER ABLATION; MICROSTRUCTURE; NANOCRYSTALLINE MATERIALS; POROSITY; SCANNING ELECTRON MICROSCOPY; X RAY DIFFRACTION;

AGGLOMERATES; CERAMIC TARGET; INDIUM TIN OXIDE (ITO);

THIN FILMS;

EID: 34547703857     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/msf.514-516.1161     Document Type: Conference Paper

References (15)

1. K. Mitsubayashi et al.: Biosens. Bioelectronics Vol.19 (2003), p. 67
2. M. Frenandes et al.: Sens. Actuators. A Vol. 92 (2001), p. 152
3. J.P. Zheng, H.S. Kwok: Appl. Phys. Lett. Vol. 63 (1) (1993), p. 1
4. T.M. Miller et al.: Sens. Actuators A Vol. 104 (2003), p. 162
5. N.G. Patel et al.: Sens. Actuators B Vol. 23 (1995), p. 49
6. R.B.H. Tahar et al.: J. Appl. Phys. Vol. 83 (5) (1998), p. 2631
7. G. Korotcenkov et al.: Sens. Actuators B Vol. 99 (2004), p. 297
8. J. Ederth et al.: Thin Solid Films Vol. 445 (2003), p. 199
9. A. Gurlo et al.: Sens. Actuators B Vol. 44 (1997), p. 327
10. N.G. Patel, P.D. Patel, V.S. Vaishnav: Sens. Actuators B Vol. 96 (2003), p. 180
11. S.M. Lee et al.: Sens. Actuators B Vol. 93 (2003), p. 31
12. A.S.A.C. Diniz, C.J. Kiely: Renewable Energy Vol. 29 (2004), p. 2037
13. J. Zhang et al.: Colloids and Surfaces A: Physicochem. Eng. Aspects Vol. 236 (2004), p. 23
14. R. Teghil et al.: Appl. Surf. Sci. Vol. 138-139 (1999), p. 522
15. V. Marotta et al.: Appl. Surf. Sci. Vol. 154-155 (2000), p.640