Dynamic scaling in ion etching of tungsten films

Applied Physics Letters

Volumn 91, Issue 5, 2007, Pages

  Peverini, Luca ^a   Ziegler, Eric ^a   Kozhevnikov, Igor ^b  

^a EUROPEAN SYNCHROTRON RADIATION FACILITY   (France)

^b SHUBNIKOV INSTITUTE OF CRYSTALLOGRAPHY   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; ION BOMBARDMENT; PROBABILITY DENSITY FUNCTION; REAL TIME CONTROL; SURFACE MORPHOLOGY; TUNGSTEN; X RAY SCATTERING;

ION ETCHING; POWER SPECTRAL DENSITY FUNCTIONS; ROUGHNESS SPECTRA; SPATIAL FREQUENCY RANGE;

METALLIC FILMS;

EID: 34547688978     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2760157     Document Type: Article

References (10)

1. A. Schindler, T. Haensel, A. Nickel, H.-J. Thomas, H. Lammert, and F. Siewert, Proc. SPIE 5180, 64 (2003).
2. D. K. Goswami and B. N. Dev, Phys. Rev. B 68, 033401 (2003).
3. G. Carter, J. Phys. D 34, R1 (2001).
4. F. Family and T. Viscek, J. Phys. A 18, L75 (1985).
5. A.-L. Barabasi and H. E. Stanley, Fractal Foncepts in Surface Growth (Cambridge University Press, Cambridge, 1995).
6. P. Meakin, Fractals, Scaling and Growth far from Equilibrium (Cambridge University Press, Cambridge, 1998).
7. L. Peverini, E. Ziegler, T. Bigault, and I. Kozhevnikov, Phys. Rev. B 72, 045445 (2005).
8. I. V. Kozhevnikov and M. V. Pyatakhin, J. X-Ray Sci. Technol. 8, 253 (2000).
9. V. E. Asadchikov, I. V. Kozhevnikov, Yu. S. Krivonosov, R. Mercier, T. H. Metzger, C. Morawe, and E. Ziegler, Nucl. Instrum. Methods Phys. Res. A 530, 575 (2004).
10. S. K. Sinha, E. B. Sirota, and S. Garoff, Phys. Rev. B 38, 2297 (1988).