Roughness conformity during tungsten film growth: An in situ synchrotron x-ray scattering study

Physical Review B - Condensed Matter and Materials Physics

Volumn 72, Issue 4, 2005, Pages

  Peverini, Luca ^a   Ziegler, Eric ^a   Bigault, Thierry ^b   Kozhevnikov, Igor ^c  

^a EUROPEAN SYNCHROTRON RADIATION FACILITY   (France)

^b INSTITUT LAUE LANGEVIN   (France)

^c SHUBNIKOV INSTITUTE OF CRYSTALLOGRAPHY   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 33749233465     PISSN: 10980121     EISSN: 1550235X     Source Type: Journal    
DOI: 10.1103/PhysRevB.72.045445     Document Type: Article

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