Fabrication of in situ ultrathin anodic aluminum oxide layers for nanostructuring on silicon substrate

Applied Physics Letters

Volumn 91, Issue 5, 2007, Pages

  Yan, Bo ^a   Pham, Hoa T M ^a   Ma, Yue ^a   Zhuang, Yan ^a   Sarro, Pasqualina M ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

FABRICATION; LITHOGRAPHY; NANOSTRUCTURED MATERIALS; SILICON; SUBSTRATES; THICKNESS MEASUREMENT;

NANODOT PREPARATION; PATTERN TRANSFER;

ALUMINA;

EID: 34547677815     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2767768     Document Type: Article

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