Radiative properties of dislocations generated around oxygen precipitates in Si

Physica Status Solidi (A) Applications and Materials Science

Volumn 204, Issue 7, 2007, Pages 2238-2247

  Steinman, E A ^a   Tereshchenko, A N ^a   Reznik, V Ya ^b   Falster, R J ^c  

^a INSTITUTE OF SOLID STATE PHYSICS   (Russian Federation)

^b INSTITUTE OF RARE METALS   (Russian Federation)

^c MEMC Electronic Materials   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

LUMINESCENCE CENTERS; RADIATIVE PROPERTIES;

ANNEALING; DEFECT DENSITY; LUMINESCENCE; OPTICAL MICROSCOPY; OXYGEN; SILICON; TRANSMISSION ELECTRON MICROSCOPY;

PRECIPITATES;

EID: 34547566700     PISSN: 18626300     EISSN: 18626319     Source Type: Journal    
DOI: 10.1002/pssa.200675454     Document Type: Article

References (18)

1. V. Kveder, V. Badylevich, E. Steinman, A. Izotov, M. Seibt, and W. Schröter, Appl. Phys. Lett. 84(12), 2106 (2004).
2. W. Bergholz et al., Philos. Mag. B 59, 499 (1989).
3. R. C. Newman, J. Phys.: Condens. Matter 12, R335 (2000).
4. R. Falster, V. V. Voronkov, V. Y. Resnik, and M. G. Milvidskii, Proc. Int. Symp. High Purity Silicon VIII (Electrochem. Soc., 2004), p. 188.
5. E. A. Steinman, phys. stat. sol. (c) 2(6), 1837 (2005).
6. E. A. Steinman, V. I. Vdovin, T. G. Yugova, V. S. Avrutin, and N. F. Izyumskaya, Semicond. Sci. Technol. 14(6), 582-586 (1999).
7. R. Sauer, J. Weber, J. Stolz, E. R. Weber, K. H. Kuster, and H. Alexander, Appl. Phys. A 36, 1 (1985).
8. E. A. Steinman and H. G. Grimmeiss, Semicond. Sci. Technol. 13, 124-129 (1998).
9. M. Tajima, M. Jokita, and M. Warashina, Mater. Sci. Forum 196-201, 1749 (1995).
10. S. Binetti, S. Pizzini, E. Leoni, R. Somashini, A. Castaldini, and A. Cavallini, J. Appl. Phys. 92, 2437 (2002).
11. E. Leoni et al., J. Electr. Soc. 151(12), G866-G869 (2004).
12. R. Falster, Spring ECS Philadelphia, Rapid Thermal and Other Short-Time Processing Symposium, Proceedings, Vol. 11 (2002), p. 1.
13. I. Yonenaga and K. Sumino, in: Dislocations in Solids, edited by H. Suzuki, T. Ninomiya, K. Sumino, and S. Takeuchi (University of Tokyo Press, Tokyo, 1985), p. 385.
14. I. Yonenaga and K. Sumino, J. Appl. Phys. 80(2), 734 (1996).
15. S. Pizzini, M. Guzzi, E. Grilli, and G. Barionetti, J. Phys.: Condens. Matter 12, 10131 (2000).
16. C. A. Londos, M. J. Binns, A. R. Brown, S. A. McQuaid, and R. C. Newman, Appl. Phys. Lett. 62(13), 1525 (1993).
17. K. Sumino and M. Imai, Philos. Mag. A 47, 753 (1983).
18. K. Schmalz and P. Gaworzewski, phys. stat. sol. (a) 64, 151 (1981).