Simulation-based approach for the accurate fabrication of blazed grating structures by FIB

Optics Express

Volumn 15, Issue 15, 2007, Pages 9444-9449

  Kim, Heung Bae ^a   Hobler, Gerhard ^a   Steiger, Andreas ^a   Lugstein, Alois ^a   Bertagnolli, Emmerich ^a  

^a VIENNA UNIVERSITY OF TECHNOLOGY   (Austria)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; ELECTRONIC STRUCTURE; FABRICATION; NANOSTRUCTURES; SUBSTRATES;

BLAZED GRATING STRUCTURES; GRATING STRUCTURES; OPTICAL DIFFRACTIVE GRATINGS; SILICON SUBSTRATES;

DIFFRACTION GRATINGS;

EID: 34547505419     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.15.009444     Document Type: Article

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