Global model simulations of low-pressure oxygen discharges

Brazilian Journal of Physics

Volumn 37, Issue 2 A, 2007, Pages 457-465

  Roberson, Geraldo ^a   Roberto, Marisa ^a   Verboncoeur, John ^b   Verdonck, Patrick ^c  

^a INSTITUTO TECNOLÓGICO DE AERONÁUTICA   (Brazil)

^b University of California at Berkeley   (United States)

^c IMEC   (Belgium)

Author keywords

Global model; Low pressure oxygen discharges; Particle in cell simulation

Indexed keywords

EID: 34547442817     PISSN: 01039733     EISSN: None     Source Type: Journal    
DOI: 10.1590/S0103-97332007000300019     Document Type: Article

References (15)

1. G.R. Misium, J. Vac. Sci. Technol. A 8, 1642 (1990).
2. A.J. Lichtenberg, V. Vahedi, and M.A. Lieberman, J. Appl. Phys. 75, 2339 (1994).
3. C. Lee, D.B. Graves, M.A. Lieberman, and D.W. Hess, J. Electrochem. Soc. 141, 1546, (1994).
4. C. Lee, M.A. Lieberman, J. Vac. Sci. Technol. A 13, 368 (1995).
5. M. Shibata, M. Nakano, and T. Makae, J. Appl. Phys. 77, 6181 (1995).
6. M. Shibata, M. Nakano, and T. Makae, J. Appl. Phys. 80, 6142 (1996).
7. M. Roberto, M. J. Verbonceour, P. Verdonck, and E. Cizzoto, Proceedings of SBMICRO 2006. ECS Transactions, 4, 1, 563, (2006).
8. J.T. Gudmundsson, A.M. Marakhtanov, K.K. Patel, V.P. Gopinath, and M.A. Lieberman, J. Phys. D: Appl. Phys. 33, 1323 (2000).
9. J.T. Gudmundsson, I.G. Kouznetsov, K.K. Patel, and M.A. Lieberman. J.Phys.D: Appl. Phys. 34, 1100, (2001).
10. T. Kimura, A.J. Lichtenberg, and M.A. Lieberman, Plasma Sources Sci. Technol. 10, 430, (2001).
11. J.T. Gudmundsson, Report RH-17-2004, University of Iceland.
12. J.T. Gudmundsson, J. Phys. D: Appl. Phys. 37, 2073, (2004).
13. S. Kim, M.A Lieberman, A.J. Lichtenberg, and J.T. Gudmundsson. J. Vac. Sci. Technol. A, 24, 6, 2025, (2006).
14. S. Kim, M.A. Lieberman, A.J. Lichtenberg, Personal communication.
15. E. Stoffels, W.W. Stoffels, D. Vender, M. Kando, G.M.W. Kroesen, and F.J. Hoog, Physical Review E, 51, 3, 2425 (1995).