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Volumn 90, Issue 26, 2007, Pages

Investigation of the chemical composition profile of SiGeSi (001) islands by analytical transmission electron microscopy

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON ENERGY LOSS SPECTROSCOPY; SEMICONDUCTING SILICON; SEMICONDUCTOR GROWTH; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY;

EID: 34547248576     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2751598     Document Type: Article
Times cited : (13)

References (11)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.