Direct insertion of oxygen atoms into the backbonds of subsurface Si atoms using translational energies of oxygen atom beams

Applied Physics Letters

Volumn 91, Issue 3, 2007, Pages

  Tagawa, Masahito ^a   Yokota, Kumiko ^a   Tsumamoto, Shinnosuke ^a   Sogo, Chie ^a   Yoshigoe, Akitaka ^b   Teraoka, Yuden ^b  

^a KOBE UNIVERSITY   (Japan)

^b JAPAN ATOMIC ENERGY AGENCY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

OXIDATION; OXYGEN VACANCIES; REACTION KINETICS; SPECTROSCOPIC ELLIPSOMETRY; SURFACE PROPERTIES; SYNCHROTRON RADIATION;

OXYGEN ATOM BEAMS; OXYGEN ATOMS; TRANSLATIONAL ENERGIES;

CRYSTAL ATOMIC STRUCTURE;

EID: 34547235015     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2759262     Document Type: Article

References (15)

1. T. K. Minton, M. Tagawa, and G. M. Nathanson, J. Spacecr. Rockets 41, 389 (2004).
2. K. Yokota, M. Tagawa, and N. Ohmae, J. Spacecr. Rockets 40, 143 (2003).
3. G. E. Caledonia, R. H. Krech, and B. D. Green, AIAA J. 25, 59 (1987).
4. R. H. Krech, M. J. Gauthier, and G. E. Caledonia, J. Spacecr. Rockets 30, 509 (1993).
5. M. Tagawa, C. Sogo, K. Yokota, S. Hachiue, A. Yoshigoe, and Y. Teraoka, Jpn. J. Appl. Phys., Part 1 44, 8300 (2005).
6. M. Tagawa, T. Ema, H. Kinoshita, N. Ohmae, and M. Umeno, Jpn. J. Appl. Phys., Part 2 37, L1455 (1998).
7. M. Tagawa, K. Yokota, N. Ohmae, H. Kinoshita, and M. Umeno, Jpn. J. Appl. Phys., Part 1 40, 6152 (2001).
8. M. Tagawa, C. Sogo, K. Yokota, A. Yoshigoe, T. Teraoka, and T. Shimura, Appl. Phys. Lett. 88, 143511 (2006).
9. K. Yokota and M. Tagawa, High Perform. Polym. 16, 221 (2004).
10. M. Tagawa, K. Yokota, N. Ohmae, and H. Kinoshita, High Perform. Polym. 12, 53 (2000).
11. Y. Saitoh, T. Nakatani, T. Matsushita, A. Agui, A. Yoshigoe, Y. Teraoka, and A. Yokoya, Nucl. Instrum. Methods Phys. Res. A 474, 253 (2001).
12. T. Miyake, S. Soeki, H. Kato, T. Nakamura, and A. Namiki, Phys. Rev. B 42, 11801 (1990).
13. K. Kato, T. Uda, and K. Terakura, Phys. Rev. Lett. 0031-9007 10.1103/PhysRevLett.80.2000 80, 2000 (1998); H. Watanabe, K. Kato, T. Uda, K. Fujita, M. Ichikawa, T. Kawamura, and K. Terakawa, Phys. Rev. Lett. 80, 345 (1998).
14. K. Kato, T. Uda, and K. Terakura, Phys. Rev. Lett. 0031-9007 10.1103/PhysRevLett.80.2000 80, 2000 (1998); H. Watanabe, K. Kato, T. Uda, K. Fujita, M. Ichikawa, T. Kawamura, and K. Terakawa, Phys. Rev. Lett. 80, 345 (1998).
15. Y. Teraoka and A. Yoshigoe, Appl. Surf. Sci. 190, 75 (2002).