Microchannels with rectangular and arched core shapes fabricated using sacrificial etching

Journal of Micro/Nanolithography, MEMS, and MOEMS

Volumn 6, Issue 1, 2007, Pages

  Lee, Jeffrey R ^a   Barber, John P ^b   George, Zachary A ^b   Lee, Milton L ^a   Schmidt, Holger ^c   Hawkins, Aaron R ^b  

^a Brigham Young University   (United States)

^b Department of Electrical and Computer Engineering   (United States)

^c University of California Santa Cruz   (United States)

Author keywords

Channel waveguides; Etching; Thin films; Vapor deposition

Indexed keywords

ETCHING; OPTICAL WAVEGUIDES; PHOTORESISTS; STRUCTURAL INTEGRITY; THIN FILMS; VAPOR DEPOSITION;

CHANNEL WAVEGUIDES; SACRIFICIAL MATERIALS; THICKNESS-TO-WIDTH RATIO;

MICROCHANNELS;

EID: 34547156164     PISSN: 19325150     EISSN: 19325134     Source Type: Journal    
DOI: 10.1117/1.2434990     Document Type: Article

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