Fabrication of hollow waveguides with sacrificial aluminum cores

IEEE Photonics Technology Letters

Volumn 17, Issue 2, 2005, Pages 363-365

  Barber, John P ^a   Conkey, Donald B ^a   Lee, Jeffrey Ryan ^a   Hubbard, Neal B ^b   Yin, Dongliang ^c   Schmidt, Holger ^c   Hawkins, Aaron R ^a  

^a BRIGHAM YOUNG UNIVERSITY   (United States)

^b Department of Electrical and Computer Engineering   (United States)

^c University of California Santa Cruz   (United States)

Author keywords

Fabrication; Micromachining; Photonic crystals; Waveguides

Indexed keywords

ALUMINUM; ANTIREFLECTION COATINGS; CRYSTAL STRUCTURE; ETCHING; FINITE ELEMENT METHOD; LIGHT TRANSMISSION; MATHEMATICAL MODELS; MECHANICAL PROPERTIES; MICROMACHINING; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PRESSURE; SILICON COMPOUNDS;

ALUMINUM CORES; GUIDED MODE PROPAGATION; HOLLOW WAVEGUIDES; INTERNAL PRESSURE; MECHANICAL INTEGRITY; PHOTONIC CRYSTALS; SACRIFICIAL CORE MATERIAL; YIELD LIMITING FACTOR;

DIELECTRIC WAVEGUIDES;

EID: 13444263643     PISSN: 10411135     EISSN: None     Source Type: Journal    
DOI: 10.1109/LPT.2004.839446     Document Type: Article

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