Enhancing nanocrystallite Si electroluminescence by suppressing oxygen decomposition in high-temperature and low-plasma-power PECVD

Journal of the Electrochemical Society

Volumn 154, Issue 8, 2007, Pages

  Lin, Chun Jung ^a   Lin, Gong Ru ^b  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

^b NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

DECOMPOSITION; ELECTROLUMINESCENCE; ELECTRON ENERGY LOSS SPECTROSCOPY; HIGH TEMPERATURE EFFECTS; OXYGEN; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SILICON;

DISSOCIATION ENERGY; OXYGEN DECOMPOSITION; THRESHOLD PLASMA POWER;

NANOCRYSTALLITES;

EID: 34347361678     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.2747535     Document Type: Article

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