SCOPUS 정보 검색 플랫폼

Applied Surface Science

Volumn 190, Issue 1-4, 2002, Pages 151-156

Structural, chemical and optical features of nanocrystalline Si films prepared by PECVD techniques

(2) Park, M B a Cho, N H a

a Inha University (South Korea)

Author keywords

Nanocrystallite; PECVD; Photoluminescence; Si; Thin film

Indexed keywords

NANOSTRUCTURED MATERIALS; OPTICAL PROPERTIES; PHOTOLUMINESCENCE; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SEMICONDUCTING SILICON; SUBSTRATES; THERMAL EFFECTS; THIN FILMS;

NANOCRYSTALLINE FILMS;

SEMICONDUCTING FILMS;

EID: 0037042082 PISSN: 01694332 EISSN: None Source Type: Journal
DOI: 10.1016/S0169-4332(01)00877-7 Document Type: Conference Paper

Times cited : (24)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.