메뉴 건너뛰기




Volumn 138, Issue 1, 2007, Pages 248-260

Fabrication of intrinsic fibre Fabry-Perot sensors in silica fibres using hydrofluoric acid etching

Author keywords

Composites; Fabry Perot; Fibre optic sensors; Hydrofluoric acid; Intrinsic strain sensor

Indexed keywords

COMPOSITE MATERIALS; CYCLIC LOADS; ETCHING; FABRY-PEROT INTERFEROMETERS; HYDROFLUORIC ACID; MICROCAVITIES; OPTICAL FIBERS; SCANNING ELECTRON MICROSCOPY; SILICA;

EID: 34347214444     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2007.04.007     Document Type: Article
Times cited : (105)

References (38)
  • 1
    • 34347243620 scopus 로고    scopus 로고
    • Fibre optic structural sensing
    • Measures R.M. Fibre optic structural sensing. Smart Mater. Struct. 7 2 (1998) U3
    • (1998) Smart Mater. Struct. , vol.7 , Issue.2
    • Measures, R.M.1
  • 4
    • 0036380436 scopus 로고    scopus 로고
    • New techniques for manufacturing optical fibre-based Fabry-Perot sensors
    • Tuck C.J., and Fernando G.F. New techniques for manufacturing optical fibre-based Fabry-Perot sensors. SPIE Smart Mater. Struct. Conf. 4694 (2002)
    • (2002) SPIE Smart Mater. Struct. Conf. , vol.4694
    • Tuck, C.J.1    Fernando, G.F.2
  • 8
    • 0010451610 scopus 로고
    • Development of a fibre Fabry-Perot (FFP) strain gauge system
    • Knowles G.J. (Ed), IOP Publishing, Bristol and Philadelphia
    • Hogg H., Mason B., Valis T., and Measures R.M. Development of a fibre Fabry-Perot (FFP) strain gauge system. In: Knowles G.J. (Ed). Active Materials and Adaptive Structures (1992), IOP Publishing, Bristol and Philadelphia 667-672
    • (1992) Active Materials and Adaptive Structures , pp. 667-672
    • Hogg, H.1    Mason, B.2    Valis, T.3    Measures, R.M.4
  • 9
    • 0033872822 scopus 로고    scopus 로고
    • Absolute strain measurement using an in fibre Bragg grating based Fabry-Perot sensor
    • Rao Y.J., Cooper M.R., Jackson D.A., Pannell C.N., and Reekie L. Absolute strain measurement using an in fibre Bragg grating based Fabry-Perot sensor. Electron. Lett. 36 8 (2000) 708-709
    • (2000) Electron. Lett. , vol.36 , Issue.8 , pp. 708-709
    • Rao, Y.J.1    Cooper, M.R.2    Jackson, D.A.3    Pannell, C.N.4    Reekie, L.5
  • 10
    • 33645675018 scopus 로고    scopus 로고
    • V.R. Machavaram, C.J. Tuck, M.C. Teagle, R.A. Badcock, G.F. Fernando, Laser micromachined and acid-etched Fabry-Perot cavities in silica fibres, in: D. Abbott, Y.S. Kivshar, H.H. Rubinsztein-Dunlop, S. Fan (Eds.), Proceedings of SPIE, vol. 6038, 2005.
  • 11
    • 0031096626 scopus 로고    scopus 로고
    • Silicon dioxide sacrificial layer etching in surface micromachining
    • Buhler J., Steiner F.P., and Baltes H. Silicon dioxide sacrificial layer etching in surface micromachining. J. Micromech. Microeng. 7 (1997) R1-R13
    • (1997) J. Micromech. Microeng. , vol.7
    • Buhler, J.1    Steiner, F.P.2    Baltes, H.3
  • 13
    • 0020154951 scopus 로고
    • Reaction of glasses with hydrofluoric acid solution
    • Tso S.T., and Pask J.A. Reaction of glasses with hydrofluoric acid solution. J. Am. Ceram. Soc. 65 7 (1982) 360-362
    • (1982) J. Am. Ceram. Soc. , vol.65 , Issue.7 , pp. 360-362
    • Tso, S.T.1    Pask, J.A.2
  • 14
    • 67651141655 scopus 로고
    • 2 in acidic fluoride solutions
    • 2 in acidic fluoride solutions. J. Electrochem. Soc. 118 11 (1971) 1772-1775
    • (1971) J. Electrochem. Soc. , vol.118 , Issue.11 , pp. 1772-1775
    • Judge, J.S.1
  • 15
    • 0023401932 scopus 로고
    • Dissolution kinetics of crystalline and amorphous silica in hydrofluoric-hydrochloric acid mixtures
    • Liang D., and Readey D.W. Dissolution kinetics of crystalline and amorphous silica in hydrofluoric-hydrochloric acid mixtures. J. Am. Ceram. Soc. 70 8 (1987) 570-577
    • (1987) J. Am. Ceram. Soc. , vol.70 , Issue.8 , pp. 570-577
    • Liang, D.1    Readey, D.W.2
  • 18
    • 0027663836 scopus 로고
    • A review of the chemical reaction mechanism and kinetics for hydrofluoric acid etching of silicon dioxide for surface micromachining applications
    • Monk D.J., and Soane D.S. A review of the chemical reaction mechanism and kinetics for hydrofluoric acid etching of silicon dioxide for surface micromachining applications. Thin Solid Films 232 (1993) 1-12
    • (1993) Thin Solid Films , vol.232 , pp. 1-12
    • Monk, D.J.1    Soane, D.S.2
  • 19
    • 0030126882 scopus 로고    scopus 로고
    • Etching kinetics of silicon dioxide in aqueous fluoride solutions: a surface complexion model
    • Asare K.O. Etching kinetics of silicon dioxide in aqueous fluoride solutions: a surface complexion model. J. Electrochem. Soc. 143 4 (1996) 1339-1347
    • (1996) J. Electrochem. Soc. , vol.143 , Issue.4 , pp. 1339-1347
    • Asare, K.O.1
  • 20
    • 37049149034 scopus 로고
    • The action of aqueous hydrofluoric acid on silica
    • Palmer W.G. The action of aqueous hydrofluoric acid on silica. J. Chem. Soc. (1930) 1656-1664
    • (1930) J. Chem. Soc. , pp. 1656-1664
    • Palmer, W.G.1
  • 21
    • 0027642731 scopus 로고
    • Determination of the etching kinetics for the hydrofluoric acid/silicon dioxide system"
    • Monk D.J., Soane D.S., and Howe R.G. Determination of the etching kinetics for the hydrofluoric acid/silicon dioxide system". J. Electrochem. Soc. 140 8 (1993) 2339-2346
    • (1993) J. Electrochem. Soc. , vol.140 , Issue.8 , pp. 2339-2346
    • Monk, D.J.1    Soane, D.S.2    Howe, R.G.3
  • 22
    • 0016114337 scopus 로고
    • Viewing refractive-index profiles and small-scale inhomogeneities in glass optical fibres: Some techniques
    • Burrus C.A., and Standley R.D. Viewing refractive-index profiles and small-scale inhomogeneities in glass optical fibres: Some techniques. Appl. Optics 13 10 (1974) 2365-2369
    • (1974) Appl. Optics , vol.13 , Issue.10 , pp. 2365-2369
    • Burrus, C.A.1    Standley, R.D.2
  • 23
    • 84987332273 scopus 로고    scopus 로고
    • M.T. Lee, Reaction if High-silica Optical Fibres with Hydrofluoric Acid, vol. 67, 1984, C21-C22.
  • 24
    • 0028497448 scopus 로고
    • Characterization of the light-guiding structure of optical fibres by atomic force microscopy
    • Zhong Q., and Inniss D. Characterization of the light-guiding structure of optical fibres by atomic force microscopy. J. Lightwave Technol. 12 9 (1994) 1517-1523
    • (1994) J. Lightwave Technol. , vol.12 , Issue.9 , pp. 1517-1523
    • Zhong, Q.1    Inniss, D.2
  • 28
    • 0142119939 scopus 로고    scopus 로고
    • Structures and properties of amorphous silicon dioxide-issues on the reliability of and novel applications
    • Nalwa H.S. (Ed), Academic Press
    • Nishikawa H. Structures and properties of amorphous silicon dioxide-issues on the reliability of and novel applications. In: Nalwa H.S. (Ed). Silicon-based Materials and Devices (2001), Academic Press 93
    • (2001) Silicon-based Materials and Devices , pp. 93
    • Nishikawa, H.1
  • 29
    • 0026880780 scopus 로고
    • Etched fibres as strain gauges
    • Vaziri M., and Chen C.L. Etched fibres as strain gauges. J. Light Wave Technol. 10 6 (1992) 836-841
    • (1992) J. Light Wave Technol. , vol.10 , Issue.6 , pp. 836-841
    • Vaziri, M.1    Chen, C.L.2
  • 31
    • 13444249869 scopus 로고    scopus 로고
    • Miniature fibre-optic pressure sensor
    • Zhu Y., and Wang A. Miniature fibre-optic pressure sensor. IEEE Photon. Technol. Lett. 17 2 (2005) 447-449
    • (2005) IEEE Photon. Technol. Lett. , vol.17 , Issue.2 , pp. 447-449
    • Zhu, Y.1    Wang, A.2
  • 32
    • 0031101137 scopus 로고    scopus 로고
    • Quasi-distributed fibre-optic chemical sensing using telecom optical fibre
    • Murphy V., Maccraith B.D., Butler T., McDonagh C., and Lawless B. Quasi-distributed fibre-optic chemical sensing using telecom optical fibre. Electron. Lett. 33 7 (1997) 618-619
    • (1997) Electron. Lett. , vol.33 , Issue.7 , pp. 618-619
    • Murphy, V.1    Maccraith, B.D.2    Butler, T.3    McDonagh, C.4    Lawless, B.5
  • 33
    • 34347261433 scopus 로고    scopus 로고
    • V.R. Machavaram, PhD Thesis, Cranfield University, Shrivenham Campus, Swindon, UK, 2006.
  • 35
    • 1142300273 scopus 로고    scopus 로고
    • Optical fibre tip fabricated by surface tension controlled etching
    • Hilton Head Island, South Carolina
    • Wong P.K., Wang T.H., and Ho C.M. Optical fibre tip fabricated by surface tension controlled etching. Solid-State Sens., Actuat. Microsyst. Workshop. Hilton Head Island, South Carolina (2002)
    • (2002) Solid-State Sens., Actuat. Microsyst. Workshop
    • Wong, P.K.1    Wang, T.H.2    Ho, C.M.3
  • 36
    • 0001736434 scopus 로고    scopus 로고
    • A simple chemical etching technique for reproducible fabrication of robust scanning near-field fibre probes
    • Chuang Y.H., Sun K.G., Wang C.J., Huang J.Y., and Pan C.L. A simple chemical etching technique for reproducible fabrication of robust scanning near-field fibre probes. Rev. Sci. Instrum. 69 2 (1998) 437-439
    • (1998) Rev. Sci. Instrum. , vol.69 , Issue.2 , pp. 437-439
    • Chuang, Y.H.1    Sun, K.G.2    Wang, C.J.3    Huang, J.Y.4    Pan, C.L.5


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.