Large area multi-wafer MOCVD of transparent and conducting ZnO films

Materials Research Society Symposium Proceedings

Volumn 957, Issue , 2007, Pages 161-168

  Tompa, Gary S ^a   Sun, S ^a   Provost, L G ^a   Mentel, Dan ^a   Sugrim, D ^a   Chan, Philip ^b   Tong, Keny ^b   Wong, Raymond ^b   Lee, A ^b  

^a STRUCTURED MATERIALS INDUSTRIES INC   (United States)

^b Podium Photonics Ltd   (Hong Kong)

Author keywords

[No Author keywords available]

Indexed keywords

DOPED FILMS; FILM MORPHOLOGY; MULTI-WAFER MOCVD; TRANSPARENT CONTACTS;

LIGHT EMITTING DIODES; PHOTOVOLTAIC CELLS; SENSORS; SILICON WAFERS; SPUTTERING; THIN FILMS; ZINC OXIDE;

METALLORGANIC CHEMICAL VAPOR DEPOSITION;

EID: 34250851423     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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