Surface morphology of Mn+ implanted Ge(1 0 0): A systematic investigation as a function of the implantation substrate temperature

Surface Science

Volumn 601, Issue 13, 2007, Pages 2623-2627

  Ottaviano, L ^a   Verna, A ^a   Grossi, V ^a   Parisse, P ^a   Piperno, S ^a   Passacantando, M ^a   Impellizzeri, G ^b   Priolo, F ^b  

^a UNIVERSITY OF L'AQUILA   (Italy)

^b UNIVERSITY OF CATANIA   (Italy)

Author keywords

Atomic force microscopy; Germanium; Ion implantation; Manganese; Scanning electron microscopy; Scanning tunneling microscopy; Surface structure, morphology, roughness, and topography; X ray photoelectron spectroscopy

Indexed keywords

ATOMIC FORCE MICROSCOPY; ION IMPLANTATION; SCANNING ELECTRON MICROSCOPY; SURFACE MORPHOLOGY; SURFACE ROUGHNESS; X RAY PHOTOELECTRON SPECTROSCOPY;

IMPINGING IONS; POROUS FILM; SUBSTRATE TEMPERATURE;

GERMANIUM;

EID: 34250730689     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.susc.2006.11.075     Document Type: Article

References (19)

1. Ohno H. Science 281 (1998) 951
2. Ohno Y., et al. Nature (London) 402 (1999) 790
3. Park Y.D., et al. Science 295 (2002) 651
4. Kang J.-S., et al. Phys. Rev. Lett. 94 (2005) 147202
5. Scarpulla M.A., et al. Appl. Phys. Lett. 82 (2003) 1251
6. Chitta V.A., et al. Appl. Phys. Lett. 85 (2004) 3777
7. Shi J., Kikkawa J.M., Proksch R., Schäffer T., Awschalom D.D., Medeiros-Ribeiro G., and Petroff P.M. Nature 377 (2002) 707
8. Bihler C., Jaeger C., Vallaitis T., Gjukic M., Brandt M.S., Pippel E., Woltersdorf J., and Gösele U. Appl. Phys. Lett. 88 (2006) 112506
9. Passacantando M., Ottaviano L., D'Orazio F., Lucari F., Impellizzeri G., and Priolo F. Phys. Rev. B 73 (2005) 195207
10. Ottaviano L., Passacantando M., Picozzi S., Continenza A., Gunnella R., Verna A., Bihlmaier G., Impellizzeri G., and Priolo F. Appl. Phys. Lett. 88 (2006) 061907
11. Ottaviano L., Passacantando M., Verna A., Gunnella R., Prencipi E., Di Cicco A., Impellizzeri G., and Priolo F. J. Appl. Phys. 100 (2006) 063528
12. Holland O.W., Appleton B.R., and Narayan J. J. Appl. Phys. 54 (1983) 2295
13. Strizker B., Elliman R.G., and Zou J. Nucl. Instr. Meth. B 175-177 (2001) 193
14. Janssens T., et al. J. Vac. Sci. Technol. B 24 (2006) 510
15. Verna A., Ottaviano L., Passacantando M., Santucci S., Picozzi P., D'Orazio F., Lucari F., De Biase M., Gunnella R., Berti M., Gasparotto A., Impellizzeri G., and Priolo F. Phys. Rev. B 74 (2006) 085204
16. Ottaviano L., Parisse P., Passacantando M., Picozzi S., Verna A., Impellizzeri G., and Priolo F. Surf. Sci. 600 (2006) 4723
17. Wang L.M., and Birtcher R.C. Philos. Mag. A 64 (1991) 1209
18. Nitta N., Taniwaki M., Hayashi Y., and Yoshiie T. J. Appl. Phys. 92 (2002) 1799
19. Smith A.J., et al. Appl. Phys. Lett. 88 (2006) 082112