A robust RF MEMS variable capacitor with piezoelectric and electrostatic actuation

IEEE MTT-S International Microwave Symposium Digest

Volumn , Issue , 2006, Pages 39-42

  Ikehashi, T ^a   Ohguro, T ^a   Ogawa, E ^a   Yamazaki, H ^a   Kojima, K ^a   Matsuo, M ^a   Ishimaru, K ^a   Ishiuchi, H ^a  

^a TOSHIBA CORPORATION   (Japan)

Author keywords

Dielectric charging; Piezoelectric actuator; RF MEMS; Stiction; Surface micromachining; Variable capacitor

Indexed keywords

CAPACITORS; ELECTROSTATIC FORCE; PIEZOELECTRIC ACTUATORS; ROBUST CONTROL; ROBUSTNESS (CONTROL SYSTEMS); STICTION; SURFACE MICROMACHINING;

DIELECTRIC CHARGING; RF MEMS; VARIABLE CAPACITOR;

ELECTROSTATIC ACTUATORS;

EID: 34250338900     PISSN: 0149645X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MWSYM.2006.249903     Document Type: Conference Paper

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