Differential sputter yield measurements using cavity ringdown spectroscopy

Applied Optics

Volumn 46, Issue 19, 2007, Pages 3987-3994

  Surla, Vijay ^a   Yalin, Azer P ^a  

^a Engineering Research Center and Hydraulics Laboratory   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MOLYBDENUM; NEODYMIUM LASERS; OPTICAL PARAMETRIC OSCILLATORS; OPTICAL PUMPING; QUARTZ CRYSTAL MICROBALANCES; SPECTROSCOPY; SPUTTERING;

CAVITY RINGDOWN SPECTROSCOPY; SPUTTERED PARTICLES;

OPTICAL MATERIALS;

ARGON; ION; MOLYBDENUM; SILICON DIOXIDE;

ARTICLE; CHEMISTRY; CRYSTALLIZATION; EQUIPMENT DESIGN; FINITE ELEMENT ANALYSIS; INSTRUMENTATION; METHODOLOGY; OPTICS; RADIATION SCATTERING; SPECTROPHOTOMETRY; STATISTICAL MODEL;

ARGON; CRYSTALLIZATION; EQUIPMENT DESIGN; FINITE ELEMENT ANALYSIS; IONS; MODELS, STATISTICAL; MOLYBDENUM; OPTICS; QUARTZ; SCATTERING, RADIATION; SPECTROPHOTOMETRY;

EID: 34250215578     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.46.003987     Document Type: Conference Paper

References (21)

1. J. E. Polk, "An overview of the results from an 8200 hour wear test of the NSTAR ion thruster," in Proceedings of the AIAA/ASME/SAE/ASEE Joint Propulsion Conference (American Institute of Aeronautics and Astronautics, 1999).
2. R. D. Kolasinski and J. E. Polk, AIAA Paper No. 2003-5144, in Proceedings of the 39th AIAA Joint Propulsion Conference (American Institute of Aeronautics and Astronautics, 2003).
3. + bombardment," in Proceedings of 42nd AIAA Joint Propulsion Conference (American Institute of Aeronautics and Astronautics, 2006).
4. E. Oyarzabal, J. H. Yu, J. Hanna, G. R. Tynan, R. P. Doerner, K. J. Taylor, and K. Schmid, "Molybdenum and carbon cluster angular sputtering distributions under low energy xenon ion bombardment," in Proceedings of the 41st AIAA Joint Propulsion Conference (American Institute of Aeronautics and Astronautics, 2006).
5. V. Shutthanandan, P. K. Ray, N. R. Shivaparan, R. J. Smith, and M. Mantenieks, "On the measurement of low-energy sputtering yield using Rutherford backscattering spectrometry," presented at The 21th International Electric Propulsion Conference (I.E.P.C., 1997).
6. V. Surla, P. J. Wilbur, M. Johnson, J. D. Williams, and A. P. Yalin, "Sputter erosion measurements of titanium and molybdenum by cavity ringdown spectroscopy," Rev. Sci. Instrum. 75, 3025-3030 (2004).
7. A. P. Yalin, V. Surla, M. Butweiller, and J. D. Williams, "Detection of sputtered metals using cavity ringdown spectroscopy," Appl. Opt. 44, 6496-6505 (2005).
8. A. P. Yalin and V. Surla, "Determination of number density and velocity of sputtered particles by cavity ringdown spectroscopy," presented at The 29th International Electric Propulsion Conference (I.E.P.C, 2005).
9. K. W. Busch and M. A. Busch, Cavity-Ringdown Spectroscopy: an Ultratrace-Absorption Measurement Technique, ACS Symposium 720 (American Chemical Society, 1999).
10. G. Berden, R. Peeters, and G. Meijer, "Cavity ring-down spectroscopy: experimental schemes and applications," Int. Rev. Phys. Chem. 19, 565-607 (2000).
11. P. Zalicki and R. N. Zare, "Cavity ring-down spectroscopy for quantitative absorption measurements," J. Chem. Phys. 102, 2708-2717 (1995).
12. A. P. Yalin and R. N. Zare, "Effect of laser line shape on the quantitative analysis of cavity ring-down signals," Laser Phys. 12, 1065-1072 (2002).
13. M. J. Pellin, C. E. Young, M. H. Mendelsohn, D. M. Gruen, R. B. Wright, and A. B. Dewald, "Oxygen and titanium sputtering yields as determined by laser fluorescence and auger electron spectroscopy for monolayer oxygen coverage of polycrstalline Ti," J. Nucl. Mater. 111-112, 738-743 (1982).
14. W. R. Hudson and B. A. Banks, AIAA Paper No. 73-1131 in Proceedings of 10th AIAA Electric Propulsion Conference (American Institute of Aeronautics and Astronautics, 1973).
15. A. P. Yalin and V. Surla, "Determination of number density and velocity of sputtered particles by cavity ring-down spectroscopy," Paper No. IEPC-2005-300, in Proceedings of 29th International Electric Propulsion Conference (I.E.P.C. 2005).
16. Z. L. Zhang and L. Zhang, "Anisotropic angular distributions of sputtered atoms," Radiat. Eff. Defects Solids 159, 301-307 (2004).
17. M. Stepanova and S. K. Dew, "Anisotropic energies of sputtered atoms under oblique ion incidence," Nucl. Instrum. Methods Phys. Res. B 215, 357-365 (2004).
18. R. E. Jones, Jr., "Theories of distribution of deposit from sputtered disk and rectangular electrodes," IBM. J. Res. Dev. 16, 27-34 (1972).
19. A. P. Yalin and V. Surla, "Velocity measurements by cavity ringdown spectroscopy," Opt. Lett. 30, 3219-3221 (2005).
20. K. A. Zoerb, J. D. Williams, D. D. Williams, and A. P. Yalin, "Differential sputtering yields of refractory metals by xenon, krypton, and Ar ion bombardment at normal and oblique incidences," in Proceedings of the 29th International Electric Propulsion Conference (I.E.P.C. 2005).
21. Y. Yamamura and H. Tawara, "Energy dependence of ioninduced sputtering yields from monatomic solids at normal incidence," At. Data Nucl. Data Tables 62, 149-253 (1996).