Sputter erosion measurements of titanium and molybdenum by cavity ring-down spectroscopy

Review of Scientific Instruments

Volumn 75, Issue 9, 2004, Pages 3025-3030

  Surla, V ^a   Wilbur, P J ^a   Johnson, M ^a   Williams, J D ^a   Yalin, A P ^a  

^a Engineering Research Center and Hydraulics Laboratory   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAVITY RING-DOWN SPECTROSCOPY (CRDS); ION BEAM CURRENTS; SPUTTER EROSION MEASUREMENTS; SURFACE LAYER ACTIVATION (SLA);

ABSORPTION SPECTROSCOPY; CATHODES; CHEMICAL MODIFICATION; ELECTRIC POTENTIAL; FLUORESCENCE; INTEGRATION; ION BEAMS; MIRRORS; PHOTOMULTIPLIERS; SPECTROSCOPIC ANALYSIS; TITANIUM;

SPUTTER DEPOSITION;

EID: 7544225804     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1786354     Document Type: Article

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