Detection of sputtered metals with cavity ring-down spectroscopy

Applied Optics

Volumn 44, Issue 30, 2005, Pages 6496-6505

  Yalin, A P ^a   Surla, V ^a   Butweiller, M ^a   Williams, J D ^a  

^a Engineering Research Center and Hydraulics Laboratory   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION; GROUND STATE; OSCILLATORS (ELECTRONIC); PUMPING (LASER); REFRACTORY METALS; SOLID STATE LASERS; SPECTROSCOPIC ANALYSIS; SPUTTERING;

ION SPUTTERING; LASER SYSTEMS; SPUTTER MODEL; SPUTTERED PARTICLES;

METAL ANALYSIS;

EID: 27944466154     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.44.006496     Document Type: Article

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