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Volumn 910, Issue , 2007, Pages 219-224

Detection of SiH3 radicals and cluster formation in a highly H2 diluted SiH4 VHF plasma by means of time resolved cavity ring down spectroscopy

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION SPECTROSCOPY; ELECTRODES; GROWTH KINETICS; HYDROGENATION; MICROCRYSTALLINE SILICON; PLASMAS; THIN FILMS;

EID: 34249941115     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (1)

References (15)
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    • 0037014756 scopus 로고    scopus 로고
    • J. P. M. Hoefnagels, A. A. E. Stevens, M. G. H. Boogaarts, W. M. M. Kessels, and M. C. M. van de Sanden, Chem. Phys. Lett. 360, 189 (2002).
    • J. P. M. Hoefnagels, A. A. E. Stevens, M. G. H. Boogaarts, W. M. M. Kessels, and M. C. M. van de Sanden, Chem. Phys. Lett. 360, 189 (2002).
  • 11
    • 33645513229 scopus 로고    scopus 로고
    • D. Kujundzic and Alan Gallagher, J. Appl. Phys. 99, 033301-1 (2006).
    • D. Kujundzic and Alan Gallagher, J. Appl. Phys. 99, 033301-1 (2006).
  • 12
    • 34249940903 scopus 로고    scopus 로고
    • αemission intensity within ∼2 mm from electrodes is a result of steric hindrance by the electrodes, as well.
    • αemission intensity within ∼2 mm from electrodes is a result of steric hindrance by the electrodes, as well.
  • 15
    • 34249948800 scopus 로고    scopus 로고
    • A. Matsuda, M. Matsumura, K. Nakagawa, T. Imura, and H. Yamamoto, Mter. Res. Soc. Proc., 164, 3 (1999).
    • A. Matsuda, M. Matsumura, K. Nakagawa, T. Imura, and H. Yamamoto, Mter. Res. Soc. Proc., 164, 3 (1999).


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.