Micromechanical sensor for studying heats of surface reactions, adsorption, and cluster deposition processes

Review of Scientific Instruments

Volumn 78, Issue 5, 2007, Pages

  Antonietti, Jean Marie ^a   Gong, Jiong ^a   Habibpour, Vahideh ^a   Röttgen, Martin A ^a   Abbet, St́phane ^a   Harding, Christopher J ^a   Arenz, Matthias ^a   Heiz, Ulrich ^a   Gerber, Christoph ^b  

^a TECHNICAL UNIVERSITY OF MUNICH   (Germany)

^b IBM RESEARCH ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

LIGHT ABSORPTION; MICROMACHINING; MICROMECHANICS; SURFACE REACTIONS; THERMAL EFFECTS; THERMAL EXPANSION;

CLUSTER DEPOSITION; MICROMACHINED SILICON CANTILEVER ARRAYS; MICROMECHANICAL SENSORS; THERMAL BENDING;

MICROSENSORS;

ADSORPTION; ARTICLE; CALORIMETRY; ELECTRONICS; ENERGY TRANSFER; EQUIPMENT; EQUIPMENT DESIGN; EVALUATION; HEAT; INSTRUMENTATION; MECHANICS; METHODOLOGY; REPRODUCIBILITY; SENSITIVITY AND SPECIFICITY; SURFACE PROPERTY; THERMODYNAMICS; THERMOGRAPHY; TRANSDUCER;

ADSORPTION; CALORIMETRY; ENERGY TRANSFER; EQUIPMENT DESIGN; EQUIPMENT FAILURE ANALYSIS; HEAT; MECHANICS; MINIATURIZATION; REPRODUCIBILITY OF RESULTS; SENSITIVITY AND SPECIFICITY; SURFACE PROPERTIES; THERMODYNAMICS; THERMOGRAPHY; TRANSDUCERS;

EID: 34249938017     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2740165     Document Type: Article

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