Silicon field emitter arrays integrated with MOSFET devices

Materials Research Society Symposium Proceedings

Volumn 685, Issue , 2001, Pages 215-220

  Hong, Ching Yin ^a   Akinwande, Akintunde I ^a  

^a Massachusetts Institute of Technology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MOSFET DEVICES; OXIDATION; SILICON; THRESHOLD VOLTAGE; TRANSMISSION ELECTRON MICROSCOPY;

FIELD EMITTER ARRAYS; GATE VOLTAGE; MECHANICAL POLISHING;

FIELD EMISSION;

EID: 34249908348     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-685-d5.27.1     Document Type: Conference Paper

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