The effects of thin-film thickness on the formaton of metallic patterns by direct nanoimprint

Journal of Materials Processing Technology

Volumn 191, Issue 1-3, 2007, Pages 326-330

  Cheng, Ming Chieh ^a   Sung, Cheng Kuo ^a   Wang, W H ^b  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

^b INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

Author keywords

Direct imprint; Molecular dynamics simulation; Thin film thickness effect

Indexed keywords

MOLECULAR DYNAMICS; NANOIMPRINT LITHOGRAPHY; THIN FILMS; COMPUTER SIMULATION; THREE DIMENSIONAL COMPUTER GRAPHICS;

DIRECT IMPRINTING; MOLECULAR DYNAMICS SIMULATION; THIN-FILM THICKNESS EFFECT;

FILM THICKNESS;

LITHOGRAPHY; PRINTING; THICKNESS; THIN FILMS;

3D MOLECULAR DYNAMICS; ALTERNATIVE MANUFACTURING PROCESS; DIRECT IMPRINT; DIRECT NANOIMPRINT; EXPERIMENTAL INVESTIGATIONS; METALLIC THIN FILMS; MOLECULAR DYNAMICS SIMULATIONS; THICKNESS EFFECT;

EID: 34249908108     PISSN: 09240136     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jmatprotec.2007.03.049     Document Type: Article

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