The rapid secondary electron imaging system of the proton beam writer at CIBA

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 260, Issue 1, 2007, Pages 390-395

  Udalagama, C N B ^a   Bettiol, A A ^a   van Kan, J A ^a   Teo, E J ^a   Watt, F ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

Data acquisition; p Beam writing; Rapid imaging; Secondary electrons

Indexed keywords

DATA TRANSFER RATES; FOCUSING; IMAGE ACQUISITION; IMAGING SYSTEMS; ION BEAM LITHOGRAPHY; OPTIMIZATION; PROTON BEAMS; SECONDARY EMISSION;

NUCLEAR MICROPROBES; SECONDARY ELECTRON IMAGING SYSTEMS; SECONDARY ELECTRONS;

NUCLEAR INSTRUMENTATION;

EID: 34249903317     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2007.02.112     Document Type: Article

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