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Volumn 90, Issue 22, 2007, Pages

Segregation and precipitation of Er in Ge

Author keywords

[No Author keywords available]

Indexed keywords

DOPING (ADDITIVES); ERBIUM; GERMANIUM; INTERFACES (MATERIALS); RECRYSTALLIZATION (METALLURGY);

EID: 34249899658     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2743881     Document Type: Article
Times cited : (6)

References (24)
  • 1
    • 0006412205 scopus 로고    scopus 로고
    • 0021-8979 10.1063/1.366265
    • See, for example, reviews by A. Polman, J. Appl. Phys. 0021-8979 10.1063/1.366265 82, 1 (1997); A. J. Kenyon, Semicond. Sci. Technol. 20, R65 (2005).
    • (1997) J. Appl. Phys. , vol.82 , pp. 1
    • Polman, A.1
  • 2
    • 27944438949 scopus 로고    scopus 로고
    • See, for example, reviews by A. Polman, J. Appl. Phys. 0021-8979 10.1063/1.366265 82, 1 (1997); A. J. Kenyon, Semicond. Sci. Technol. 20, R65 (2005).
    • (2005) Semicond. Sci. Technol. , vol.20 , pp. 65
    • Kenyon, A.J.1
  • 9
    • 33749620725 scopus 로고    scopus 로고
    • See, for example, C. Bostedt, T. van Buuren, T. M. Willey, N. Franco, L. J. Terminello, C. Heske, and T. Moeller, Appl. Phys. Lett. 0003-6951 10.1063/1.1751616 84, 4056 (2004); M. Jing, M. Ni, W. Song, J. Lu, Z. Gao, L. Lai, W. N. Mei, D. Yu, H. Ye, and L. Wang, J. Phys. Chem. 110, 18332 (2006).
    • (2006) J. Phys. Chem. , vol.110 , pp. 18332
    • Jing, M.1    Ni, M.2    Song, W.3    Lu, J.4    Gao, Z.5    Lai, L.6    Mei, W.N.7    Yu, D.8    Ye, H.9    Wang, L.10
  • 10
    • 0020098511 scopus 로고
    • 0021-8979 10.1063/1.331636
    • See, for example, I. H. Wilson, J. Appl. Phys. 0021-8979 10.1063/1.331636 53, 1698 (1982); B. R. Appleton, O. W. Holland, J. Narayan, O. E. Schow III, J. S. Williams, K. T. Short, and E. Lawson, Appl. Phys. Lett. 0003-6951 10.1063/1.93643 41, 711 (1982); L. M. Wang and B. C. Birtcher, Philos. Mag. A 64, 1209 (1991).
    • (1982) J. Appl. Phys. , vol.53 , pp. 1698
    • Wilson, I.H.1
  • 12
    • 0026399206 scopus 로고
    • See, for example, I. H. Wilson, J. Appl. Phys. 0021-8979 10.1063/1.331636 53, 1698 (1982); B. R. Appleton, O. W. Holland, J. Narayan, O. E. Schow III, J. S. Williams, K. T. Short, and E. Lawson, Appl. Phys. Lett. 0003-6951 10.1063/1.93643 41, 711 (1982); L. M. Wang and B. C. Birtcher, Philos. Mag. A 64, 1209 (1991).
    • (1991) Philos. Mag. A , vol.64 , pp. 1209
    • Wang, L.M.1    Birtcher, B.C.2
  • 14
    • 0017471371 scopus 로고
    • 0038-1098 10.1016/0038-1098(77)90009-6
    • L. Csepregi, R. P. Kuellen, J. W. Mayer, and T. W. Sigmon, Solid State Commun. 0038-1098 10.1016/0038-1098(77)90009-6 21, 1019 (1977); C. J. Palmstrom and G. J. Galvin, Appl. Phys. Lett. 0003-6951 10.1063/1.95993 47, 815 (1985); A. Satta, E. Simoen, T. Clarysse, T. Janssens, A. Benedetti, B. De Jaeger, M. Meuris, and W. Vandervorst, Appl. Phys. Lett. 87, 172109 (2005).
    • (1977) Solid State Commun. , vol.21 , pp. 1019
    • Csepregi, L.1    Kuellen, R.P.2    Mayer, J.W.3    Sigmon, T.W.4
  • 15
    • 6044262752 scopus 로고
    • 0003-6951 10.1063/1.95993
    • L. Csepregi, R. P. Kuellen, J. W. Mayer, and T. W. Sigmon, Solid State Commun. 0038-1098 10.1016/0038-1098(77)90009-6 21, 1019 (1977); C. J. Palmstrom and G. J. Galvin, Appl. Phys. Lett. 0003-6951 10.1063/1.95993 47, 815 (1985); A. Satta, E. Simoen, T. Clarysse, T. Janssens, A. Benedetti, B. De Jaeger, M. Meuris, and W. Vandervorst, Appl. Phys. Lett. 87, 172109 (2005).
    • (1985) Appl. Phys. Lett. , vol.47 , pp. 815
    • Palmstrom, C.J.1    Galvin, G.J.2
  • 19
    • 0024034447 scopus 로고
    • 0920-2307 10.1016/S0920-2307(88)80005-7
    • See, for example, G. L. Olson and J. A. Roth, Mater. Sci. Rep. 0920-2307 10.1016/S0920-2307(88)80005-7 3, 1 (1988); R. G. Elliman and Z. W. Fang, J. Appl. Phys. 0021-8979 10.1063/1.352980 73, 3313 (1993); H. Francois-Sait-Cyr, E. Anoshkina, F. Stevie, L. Chow, K. Richardson, and D. Zhou, J. Vac. Sci. Technol. B 1071-1023 10.1116/1.1396638 19, 1769 (2001); P. Zhang, F. Stevie, R. Vanfleet, R. Neelakantan, M. Klimov, D. Zhou, and L. Chow, J. Appl. Phys. 96, 1053 (2004).
    • (1988) Mater. Sci. Rep. , vol.3 , pp. 1
    • Olson, G.L.1    Roth, J.A.2
  • 20
    • 31144457528 scopus 로고
    • 0021-8979 10.1063/1.352980
    • See, for example, G. L. Olson and J. A. Roth, Mater. Sci. Rep. 0920-2307 10.1016/S0920-2307(88)80005-7 3, 1 (1988); R. G. Elliman and Z. W. Fang, J. Appl. Phys. 0021-8979 10.1063/1.352980 73, 3313 (1993); H. Francois-Sait-Cyr, E. Anoshkina, F. Stevie, L. Chow, K. Richardson, and D. Zhou, J. Vac. Sci. Technol. B 1071-1023 10.1116/1.1396638 19, 1769 (2001); P. Zhang, F. Stevie, R. Vanfleet, R. Neelakantan, M. Klimov, D. Zhou, and L. Chow, J. Appl. Phys. 96, 1053 (2004).
    • (1993) J. Appl. Phys. , vol.73 , pp. 3313
    • Elliman, R.G.1    Fang, Z.W.2
  • 21
    • 0035440720 scopus 로고    scopus 로고
    • 1071-1023 10.1116/1.1396638
    • See, for example, G. L. Olson and J. A. Roth, Mater. Sci. Rep. 0920-2307 10.1016/S0920-2307(88)80005-7 3, 1 (1988); R. G. Elliman and Z. W. Fang, J. Appl. Phys. 0021-8979 10.1063/1.352980 73, 3313 (1993); H. Francois-Sait-Cyr, E. Anoshkina, F. Stevie, L. Chow, K. Richardson, and D. Zhou, J. Vac. Sci. Technol. B 1071-1023 10.1116/1.1396638 19, 1769 (2001); P. Zhang, F. Stevie, R. Vanfleet, R. Neelakantan, M. Klimov, D. Zhou, and L. Chow, J. Appl. Phys. 96, 1053 (2004).
    • (2001) J. Vac. Sci. Technol. B , vol.19 , pp. 1769
    • Francois-Sait-Cyr, H.1    Anoshkina, E.2    Stevie, F.3    Chow, L.4    Richardson, K.5    Zhou, D.6
  • 22
    • 3242679099 scopus 로고    scopus 로고
    • See, for example, G. L. Olson and J. A. Roth, Mater. Sci. Rep. 0920-2307 10.1016/S0920-2307(88)80005-7 3, 1 (1988); R. G. Elliman and Z. W. Fang, J. Appl. Phys. 0021-8979 10.1063/1.352980 73, 3313 (1993); H. Francois-Sait-Cyr, E. Anoshkina, F. Stevie, L. Chow, K. Richardson, and D. Zhou, J. Vac. Sci. Technol. B 1071-1023 10.1116/1.1396638 19, 1769 (2001); P. Zhang, F. Stevie, R. Vanfleet, R. Neelakantan, M. Klimov, D. Zhou, and L. Chow, J. Appl. Phys. 96, 1053 (2004).
    • (2004) J. Appl. Phys. , vol.96 , pp. 1053
    • Zhang, P.1    Stevie, F.2    Vanfleet, R.3    Neelakantan, R.4    Klimov, M.5    Zhou, D.6    Chow, L.7


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