Optical properties of sputtered amorphous beryllium nitride thin films

Journal of Applied Physics

Volumn 101, Issue 10, 2007, Pages

  Khoshman, J M ^a   Khan, A ^b   Kordesch, M E ^b  

^a AL HUSSEIN BIN TALAL UNIVERSITY   (Jordan)

^b OHIO UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BERYLLIUM NITRIDE; ELLIPSOMETRIC FITTING PROCEDURE; EXTINCTION COEFFICIENTS; WAVELENGTH RANGE;

AMORPHOUS FILMS; BERYLLIUM COMPOUNDS; DEPOSITION; OPTICAL PROPERTIES; PHOTOLUMINESCENCE; REACTIVE SPUTTERING; X RAY DIFFRACTION;

THIN FILMS;

EID: 34249898071     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2738393     Document Type: Article

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