Integration of functional epitaxial oxides into silicon: From high- K application to nanostructures

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 25, Issue 3, 2007, Pages 1039-1043

  Osten, H J ^a   Kuhne D ^a   Laha, A ^a   Czernohorsky, M ^a   Bugiel, E ^a   Fissel, A ^a  

^a LEIBNIZ UNIVERSITY HANNOVER   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EPITAXIAL GROWTH; MOLECULAR BEAM EPITAXY; NANOSTRUCTURES; OXIDES; RARE EARTH ELEMENTS; VACUUM APPLICATIONS;

CUBIC BIXBYITE STRUCTURE; EPITAXIAL OXIDES; LANTHANIDE OXIDES; SOLID STATE MOLECULAR BEAM EPITAXY;

SILICON;

EID: 34249898037     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2720858     Document Type: Article

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