Manufacture of microlens arrays and fan-out gratings in photoresist

IEE Colloquium (Digest)

Volumn , Issue 76, 1990, Pages

  Hutley, M C ^a   Stevens, R F ^a   Daly, D ^a  

^a NATIONAL PHYSICAL LABORATORY   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

LENSES--FABRICATION; OPTICAL GRATINGS--FABRICATION; PHOTORESISTS;

FAN OUT GRATINGS; MICROLENS ARRAYS; OPTICAL COMPONENTS; PHOTORESIST MATERIALS;

OPTICAL SYSTEMS;

EID: 0025532075     PISSN: 09633308     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)