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Volumn 4827, Issue , 2002, Pages 80-87
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Laser doppler vibrometry for optical MEMS
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Author keywords
Doppler; Laser; MEMS; Microscopic; Mirror; MOEMS; Optical; Sw itch; Vibration; Vibrometer
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Indexed keywords
LASER DOPPLER VELOCIMETERS;
MICROELECTROMECHANICAL DEVICES;
MIRRORS;
OPTICAL SWITCHES;
OPTICAL TESTING;
REAL TIME SYSTEMS;
SCANNING;
LASER DOPPLER VIBROMETRY;
VIBRATION MEASUREMENT;
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EID: 0036417408
PISSN: 0277786X
EISSN: None
Source Type: Journal
DOI: 10.1117/12.468168 Document Type: Article |
Times cited : (12)
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References (8)
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