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Volumn 4827, Issue , 2002, Pages 80-87

Laser doppler vibrometry for optical MEMS

Author keywords

Doppler; Laser; MEMS; Microscopic; Mirror; MOEMS; Optical; Sw itch; Vibration; Vibrometer

Indexed keywords

LASER DOPPLER VELOCIMETERS; MICROELECTROMECHANICAL DEVICES; MIRRORS; OPTICAL SWITCHES; OPTICAL TESTING; REAL TIME SYSTEMS; SCANNING;

EID: 0036417408     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.468168     Document Type: Article
Times cited : (12)

References (8)
  • 1
    • 0011265864 scopus 로고    scopus 로고
    • New developments in laser doppler vibrometer optical systems and demodulation schemes for measurements on mems and other micro structures
    • Brazil, September
    • Siegmund, Georg, et al., "New Developments in Laser Doppler Vibrometer optical systems and demodulation schemes for measurements on MEMS and other micro structures", COBEM Proceedings, Brazil, September 2001.
    • (2001) COBEM Proceedings
    • Siegmund, G.1
  • 2
    • 0011265865 scopus 로고
    • Non-contact surface vibration analysis using a monomode fiber optic interferometer
    • Lewin, Andrew, "Non-contact surface vibration analysis using a monomode fiber optic interferometer", CSL Instrum., Vol 18, 1985.
    • (1985) CSL Instrum. , vol.18
    • Lewin, A.1
  • 3
    • 0038111002 scopus 로고    scopus 로고
    • LDV measurements in MEMS: A sampling of capability
    • San Diego, March 22
    • Turner, Kimberly "LDV Measurements in MEMS: A sampling of capability", Proceeding of 2002 PSY User's Meeting, San Diego, March 22, 2002.
    • (2002) Proceeding of 2002 PSY User's Meeting
    • Turner, K.1
  • 4
    • 0011314919 scopus 로고    scopus 로고
    • Unique characterization solutions enabled by laser doppler vibrometer measurements
    • San Diego, March 22
    • Speller, Kevin "Unique characterization solutions enabled by laser Doppler Vibrometer measurements", Proceeding of 2002 PSV User's Meeting, San Diego, March 22, 2002.
    • (2002) Proceeding of 2002 PSV User's Meeting
    • Speller, K.1
  • 6
    • 0031268305 scopus 로고    scopus 로고
    • Micromachining of optical and optoelectronic systems
    • November
    • Wu, Ming, "Micromachining of Optical and Optoelectronic Systems", Proceedings of the IEEE, Vol. 85, No. 11, Pgs. 1833 - 1835, November 1997.
    • (1997) Proceedings of the IEEE , vol.85 , Issue.11 , pp. 1833-1835
    • Wu, M.1
  • 7
    • 0000519178 scopus 로고    scopus 로고
    • A MEMS mirror for optical scanning
    • Chicago, IL, June 5-7
    • Goldberg, Howard, et al., "A MEMS mirror for optical scanning", Proceedings of Sensors Expo Spring 2001, pp. 331-335, Chicago, IL, June 5-7, 2001.
    • (2001) Proceedings of Sensors Expo Spring 2001 , pp. 331-335
    • Goldberg, H.1
  • 8
    • 0011267653 scopus 로고    scopus 로고
    • Packaging automation drives wdm component assembly
    • November
    • Jordan, Scott, "Packaging Automation drives WDM component assembly", WDM Solutions, Pgs. 44-48, November 1997.
    • (1997) WDM Solutions , pp. 44-48
    • Jordan, S.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.