Numerical modeling and verification of gas flow through a network of crossed narrow v-grooves

Journal of Micromechanics and Microengineering

Volumn 16, Issue 10, 2006, Pages 2006-2013

  Bejhed, Johan ^a   Nguyen, Hugo ^a   Åstrand, Peter ^a   Eriksson, Anders ^a   Köhler, Johan ^a  

^a UPPSALA UNIVERSITY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; FINITE ELEMENT METHOD; MATHEMATICAL MODELS; MICROMACHINING; NAVIER STOKES EQUATIONS; NUMBER THEORY; NUMERICAL METHODS; SILICON WAFERS;

KNUDSEN NUMBER CORRECTIONS; LAMINAR ISOTHERMAL FLOW; MICROMACHINED CHANNELS; POISEUILLE NUMBER CALCULATIONS;

GAS METERS;

EID: 33748804216     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/16/10/013     Document Type: Article

References (27)

1. van de Pol F C M and Branebjerg J 1991 Micro fluid-handling systems-state of the art and opportunities 5th Int. Conf. Advanced Robotics (Pisa, Italy, 19-22 June) pp 283-90
2. Gravesen P, Branebjerg J and Søndergrd Jensen O 1993 Microfluidics-a review J. Micromech. Microeng. 3 168-82
3. Shoji S and Esashi M 1994 Microflow devices and systems J. Micromech. Microeng. 4 157-71
4. Stemme G 1995 Micro fluid sensors and actuators 6th Int. Symp. Micro Machine and Human Science (Nagoya, Japan, 4-6 Oct) pp 45-52
5. Zengerle R and Sandmaier H 1996 Microfluidics 7th Int. Symp. Micro Machine and Human Science (Nagoya, Japan, 2-4 Oct) pp 13-20
6. Verpoorte E and de Rooij N F 2003 Microfluidics meets MEMS Proc. IEEE 91 930-53
7. Harley J C 1993 Compressible gas flows in microchannels and microjets PhD thesis University of Pennsylvania
8. Harley J C, Huang Y, Bau H H and Zemel J M 1995 Gas flow in micro-channels J. Fluid Mech. 284 257-74
9. Chatterjee A 2003 Generalized numerical formulations for multi-physics microfluidics-type applications J. Micromech. Microeng. 13 758-67
10. Jie D, Diao X, Cheong K B and Yong L K 2000 Navier-Stokes simulations of gas flow in micro devices J. Micromech. Microeng. 10 372-9
11. Jain V and Lin C X 2006 Numerical modeling of three-dimensional compressible gas flow in microchannels J. Micromech.Microeng. 16 292-302
12. Robertson J K and Wise K D 2001 Modeling a microfluidic system using Knudsen's empirical equation for flow in the transition regime J. Vac. Sci. Technol. A 19 358-64
13. Wang M and Li Z 2004 Simulations for gas flows in microgeometries using the direct simulation Monte Carlo method J. Heat Fluid Flow 24 975-85
14. Cai C, Boyd I D, Fan J and Candler G V 2000 Direct simulation methods for low-speed microchannels flows J. Thermophys. Heat Transf. 14 368-78
15. Brody J P, Osborn T D, Forster F K and Yager P 1996 A planar microfabricated fluid filter Sensors Actuators A 54 704-8
16. Stemme G and Kittilsland G 1988 New fluid filter structure in silicon fabricated using a self-aligning technique Appl. Phys. Lett. 53 1566-8
17. Kittilsland G and Stemme G 1990 A sub-micron particle filter in silicon Sensors Actuators A 21-23 904-7
18. Tong H D, Gielens F C, Gardeniers J G E, Jansen H V, Berenschot J W, De Boer M J, De Boer J H, Van Rijn C J M and Elwenspoek M 2005 Microsieve supporting palladium-silver alloy membrane and application to hydrogen separation J. Microelectromech. Syst. 14 113-24
19. Drake J and Jerman H 1995 A precision flow restrictor for medical infusion therapy 8th Int. Conf. Solid State Sensors and Actuators, and Eurosensors IX (Stockholm, Sweden, 25-29 June) pp 373-6
20. Kuiper S, van Rijn C J M, Nijdam W and Elwenspoek M C 1998 Development and application of very high flux microfiltration membranes J. Membrane Sci. 150 1-8
21. van Rijn C J M and Elwenspoek M C 1995 Micro filtration membrane sieve with silicon micro machining for industrial and biomedical applications Proc. IEEE Micro Electro Mechanical Systems (29 Jan-2 Feb) pp 83-7
22. Köhler J, Bejhed J, Kratz H, Lindberg U, Hjort K and Stenmark L 2002 A hybrid cold gas microthruster system for spacecraft Sensors Actuators A 97-98 587-98
23. Bejhed J, Nguyen H, Eriksson A B, Stenmark L and Köhler J 2006 Characterization of a particle filter made from crossed v-grooves in silicon J. Micromech. Microeng. submitted
24. White F M 1991 Poiseuille flow through ducts Viscous Fluid Flow (McGraw-Hill Series in Mechanical Engineering) 2nd edn (New York: McGraw-Hill) pp 114-32
25. Comsol Multiphysics 2006 www.comsol.com
26. Park S-J, Chung S, Bang H-W, Chung C, Han D-C and Chang J-K 2002 Modeling and designing of microfluidic system using Poiseuille number 2nd Ann. Int. IEEE-EMBS Spec. Topic Conf. Microtechnologies in Medicine and Biology (Madison, WI, 2-4 May) pp 565-8
27. Cheng K B, Wong M and Zohar Y 2003 Parallel and series multiple microchannel systems Proc. IEEE 16th Ann. Int. Conf. Micro Electro Mechanical Systems (Kyoto, Japan, 19-23 Jan) pp 291-4