Techniques for high-quality SiO2 films

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6479, Issue , 2007, Pages

  Nguyen, J ^a   Razeghi, M ^a  

^a NORTHWESTERN UNIVERSITY   (United States)

Author keywords

Ion beam sputtering deposition; Silicon dioxide; Surface passivation; Type II photodetectors

Indexed keywords

DENSELY PACKED FILMS; ION-BEAM SPUTTERING DEPOSITION; SURFACE PASSIVATION; TYPE II PHOTODETECTORS;

ELECTRIC PROPERTIES; INTERFACES (MATERIALS); OPTICAL PROPERTIES; PHOTODETECTORS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SEMICONDUCTING FILMS; SPUTTER DEPOSITION;

SILICA;

EID: 34248666734     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.716608     Document Type: Conference Paper

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