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Volumn 84, Issue 9-10, 2007, Pages 1917-1920

A physics-based deconstruction of the percolation model of oxide breakdown

Author keywords

Failure statistics; Microelectronics reliability; Oxide breakdown; Percolation models

Indexed keywords

DATA REDUCTION; GATES (TRANSISTOR); MATHEMATICAL MODELS; MICROELECTRONICS; PERCOLATION (SOLID STATE); STATISTICS;

EID: 34248657004     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2007.04.008     Document Type: Article
Times cited : (19)

References (11)
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  • 3
    • 0035362378 scopus 로고    scopus 로고
    • New physics-based analytic approach to the thin-oxide breakdown statistics
    • Suñé J. New physics-based analytic approach to the thin-oxide breakdown statistics. IEEE Electron Dev. Lett. 22 (2001) 296-298
    • (2001) IEEE Electron Dev. Lett. , vol.22 , pp. 296-298
    • Suñé, J.1
  • 4
    • 28744439037 scopus 로고    scopus 로고
    • R. Degraeve, B. Govoreanu, B. Kaczer, J. Van Houdt and G. Groeseneken, Measurement and statistical analysis of single-trap current-voltage characteristics in ultrathin SiON, in: Proc. of the International Reliability Physics Symposium (2005) 360-365.
  • 5
    • 3142784390 scopus 로고    scopus 로고
    • F. Schuler, R. Degraeve, P. Hendrickx and D. Wellekens, Physical description of anomalous charge loss in floating gate based NVM's and identification of its dominant parameter, in: Proc. of the International Reliability Physics Symposium (2002) 26-33.
  • 7
    • 0037432887 scopus 로고    scopus 로고
    • Sampling problems for randomly broken sticks
    • Huillet T. Sampling problems for randomly broken sticks. J. Phys. A: Math. Gen. 36 (2003) 3947-3960
    • (2003) J. Phys. A: Math. Gen. , vol.36 , pp. 3947-3960
    • Huillet, T.1
  • 8
    • 46049086984 scopus 로고    scopus 로고
    • P.E. Nicollian, A.T. Krishnan, C.A. Chancellor, and R.B. Khamankar, The traps that cause breakdown in deeply scaled SiON dielectrics, in: International Electron Devices Meeting (2006) 743-746.
  • 9
    • 34248648853 scopus 로고    scopus 로고
    • E.Y. Wu, J. Suñé, W.L. Lai, A. Vayshenker and D.Harmon, A Comprehensive Investigation of Gate Oxide Breakdown of P+Poly/PFETs Under Inversion Mode, in: International Electron Devices Meeting (2005) 407-410.
  • 10
    • 21644473075 scopus 로고    scopus 로고
    • B. Kaczer, R. Degraeve, R.O'Connor, Ph. Roussel and G. Groeseneken, Implications of progressive wear-out for lifetime extrapolations of ultra-thin (EOT ∼ 1 nm) SiON films, in: International Electron Devices Meeting (2004) 713-716.
  • 11
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    • Power-law voltage acceleration: a key element for ultra-thin gate oxide reliability
    • Wu E.Y., and Suñé J. Power-law voltage acceleration: a key element for ultra-thin gate oxide reliability. Microelectronics Reliability 85 (2005) 1809-1834
    • (2005) Microelectronics Reliability , vol.85 , pp. 1809-1834
    • Wu, E.Y.1    Suñé, J.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.