Free carrier distribution profiling of 4H-SiC substrates using a commercial optical scanner

Journal of Applied Physics

Volumn 101, Issue 9, 2007, Pages

  Caldwell, Joshua D ^a   Glembocki, Orest J ^a   Prokes, Sharka M ^a   Glaser, Evan R ^a   Hobart, Karl D ^a   Hansen, Darren M ^b   Chung, Gilyong ^b   Bolotnikov, Alexander V ^c   Sudarshan, Tangali S ^c  

^a NAVAL RESEARCH LABORATORY   (United States)

^b DOW CORNING CORPORATION   (United States)

^c The Department of Mechanical Engineering   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BLUE (RGB) LUMINANCE VALUES; COMMERCIAL OPTICAL SCANNERS; DOPING DENSITY (ND); LEHIGHTON RESISTIVITY MAPS; POLYCRYSTALLINITY; SIC SUBSTRATES;

CARRIER CONCENTRATION; CONFORMAL MAPPING; FREE ENERGY; POLYCRYSTALLINE MATERIALS; RAMAN SPECTROSCOPY; SCANNING;

SILICON CARBIDE;

EID: 34248588158     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2722251     Document Type: Conference Paper

References (13)

1. R. Weingartner, M. Bickermann, S. Bushevoy, D. Hofmann, M. Rasp, T. L. Straubinger, P. J. Wellman, and A. Winnacker, Mater. Sci. Eng. B 80, 357 (2001). 0921-5107
2. O. Glembocki, S. M. Prokes, R. E. Stahlbush, and M. F. MacMillan, J. Electron. Mater. 34, 382 (2005).
3. S. -i. Nakashima and H. Harima, Phys. Status Solidi A 0031-8965 10.1002/1521-396X(199707)162:1<39::AID-PSSA39>3.0.CO;2-L 162, 39 (1997).
4. P. G. Muzykov, Y. I. Khlebnikov, S. V. Regula, Y. Gao, and T. S. Sudarshan, J. Electron. Mater. 32, 505 (2003).
5. H. Harima, S. -i. Nakashima, and T. Uemura, J. Appl. Phys. 0021-8979 10.1063/1.360174 78, 1996 (1995).
6. S. G. Sridhara, S. Bai, O. Shigiltchoff, R. P. Devaty, and W. J. Choyke, Mater. Sci. Forum 338-342, 551 (2000).
7. S. Limpijumnong and W. R. L. Lambrecht, Phys. Rev. B 0163-1829 10.1103/PhysRevB.57.12017 57, 12017 (1998).
8. G. B. Dubrovskii, A. A. Lepneva, and E. I. Radovana, Phys. Status Solidi B 57, 423 (1973).
9. P. J. Wellmann and R. Weingartner, Mater. Sci. Eng. B 102, 262 (2003). 0921-5107
10. R. Weingartner, M. Bickermann, S. Bushevoy, D. Hofmann, M. Rasp, T. L. Straubinger, P. J. Wellman, and A. Winnacker, Mater. Sci. Eng. B 80, 357 (2001). 0921-5107
11. P. J. Wellmann, R. Weingartner, M. Bickermann, T. L. Straubinger, and A. Winnacker, Mater. Sci. Eng. B 91-92, 75 (2002). 0921-5107
12. P. T. B. Shaffer, Appl. Opt. 10, 1034 (1971). 0003-6935
13. J. D. Caldwell, O. J. Glembocki, D. M. Hansen, G. Chung, K. D. Hobart, and F. Kub, Mater. Sci. Forum 357-359, 725 (2006).