Determination of doping levels and their distribution in SiC by optical techniques

Materials Science and Engineering: B

Volumn 102, Issue 1-3, 2003, Pages 262-268

  Wellmann, P J ^a   Weingartner R ^a  

^a UNIVERSITY OF ERLANGEN NUREMBERG   (Germany)

Author keywords

Absorption mapping; Characterization; Doping; Silicon carbide

Indexed keywords

CARRIER CONCENTRATION; DOPING (ADDITIVES); LIGHT ABSORPTION; MAPPING; QUALITY CONTROL; SEMICONDUCTING GALLIUM ARSENIDE;

ABSORPTION MAPPING;

SILICON CARBIDE;

EID: 0042431975     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-5107(02)00707-9     Document Type: Conference Paper

References (17)

1. Hobgood D., Brady M., Brixius W., Fechko G., Glass R., Henshall D., Jenny J., Leonard R., Malta D., Müller S.G., Tsvetkov V., Carter C. Jr. Mater. Sci. Forum. 338-342:2000;3-8.
2. Biedermann E. Solid State Commun. 3:1965;343-346.
3. Choyke W.J., Patrick L. Phys. Rev. 172:(3):1968;769-772.
4. Dubrovskii G.B., Lepneva A.A., Radovanova E.I. Phys. Status Solidi (b). 57:1973;423-431.
5. Persson C., Lindefelt U. J. Appl. Phys. 83:(1):1998;266-269.
6. Wellmann P.J., Bushevoy S., Weingärtner R. Mater. Sci. Eng. B80:(1-3):2001;352-356.
7. Stiasny T., Helbig R. Phys. Status Solidi A. 162:1997;239.
8. Limpijumnong S., Lambrecht W.R.L. Phys. Rev. B. 57:(19):1998;12017-12022.
9. Sridhara S.G., Bai S., Shigiltchoff O., Devaty R.P., Choyke W.J. Mater. Sci. Forum. 338-342:2000;551-554.
10. Wellmann P.J., Weingärtner R., Bickermann M., Straubinger T.L., Winnacker A. Mater. Sci. Eng. B91-92:2002;75-78.
11. Weingärtner R., Wellmann P.J., Bickermann M., Hofmann D., Straubinger T.L., Winnacker A. Appl. Phys. Lett. 80:(1):2002;70-72.
12. Weingärtner R., Bickermann M., Bushevoy S., Hofmann D., Rasp M., Straubinger T.L., Wellmann P.J., Winnacker A. Mater. Sci. Eng. B80:(1-3):2001;357-361.
13. Henry A., Ellison A., Forsberg U., Magnusson B., Pozina G., Janzen E. Mater. Sci. Forum. 389-393:2002;593-596.
14. Tajima M., Tanaka M., Hoshino N. Mater. Sci. Forum. 389-393:2002;597-600.
15. Masarotto L., Bluet J.M., Berenguer M., Girard P., Guillot G. Mater. Sci. Forum. 353-356:2001;393-396.
16. Masarotto L., Bluet J.M., Guillot G. Mater. Sci. Forum. 389-393:2002;601-604.
17. Schneider K., Helbig R. Mater. Sci. Forum. 389-393:2002;605-608.