Self-aligned tantalum oxide nanodot arrays through anodic alumina template

Microelectronic Engineering

Volumn 83, Issue 4-9 SPEC. ISS., 2006, Pages 1567-1570

  Wu, Chia Tien ^a   Ko, Fu Hsiang ^a   Hwang, Hsin Yen ^a  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

Author keywords

Nanodot; Porous alumina

Indexed keywords

ALUMINA; ALUMINUM; NANOSTRUCTURED MATERIALS; OXIDATION; POROUS MATERIALS; SCANNING ELECTRON MICROSCOPY; X RAY PHOTOELECTRON SPECTROSCOPY;

NANODOT; POROUS ALUMINA; TANTALUM OXIDE;

TANTALUM COMPOUNDS;

EID: 33646063835     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2006.01.092     Document Type: Article

References (20)

1. Lu W., Ji Z.Q., Pfeiffer L., West K.W., and Rimberg A.J. Nature 423 (2003) 422
2. Harman T.C., Taylor P.J., Walsh M.P., and LaForge B.E. Science 297 (2002) 2229
3. Gammon D., Snow E.S., and Shanabrook B.V. Science 273 (1996) 87
4. Chou S.Y., Krauss P.R., and Rrnstrom P.J. Science 272 (1996) 85
5. Freeman R.G., Grabar K.C., Allison K.J., Bright R.M., Davis J.A., Guthrie A.P., Hommer M.B., Jackson M.A., Smith P.C., Walter D.G., and Natan M.J. Science 267 (1995) 1629
6. Roder H., Hahn E., Brune H., Buchern J.P., and Korn K. Nature 366 (1993) 141
7. Notzel R., Temmyo J., and Tamamura T. Nature 369 (1994) 131
8. Masuda H., and Fukuda K. Science 268 (1995) 146
9. Sapp S.A., Lakshmi B.B., and Martin C.R. Adv. Mater. 11 (1999) 402
10. Cao H.Q., Xu Y., Hong J.M., Liu H.B., Yin G., Li B.L., Tie C.Y., and Xu Z. Adv. Mater. 18 (2001) 1393
11. Lee S.B., Mitchell D.T., Trofin L., Nevanen T.K., Soderlund H., and Martin C.R. Science 296 (2002) 2198
12. Che G., Lakshmi B.B., Martin C.R., Fisher E.R., and Ruoff R.S. Chem. Mater. 10 (1998) 26
13. Masuda H., and Satoh M. Jpn. J. Appl. Phys. 35 (1996) L126
14. Masuda H., Yasui K., and Nishio K. Adv. Mater. 12 (2000) 1031
15. Sander M.S., and Tan L.S. Adv. Funct. Mater. 13 (2003) 393
16. Masuda H., Hasegwa F., and Ono S. J. Electrochem. Soc. 144 (1997) L122
17. Course D., Lo Y.H., Miller A.E., and Course M. Appl. Phys. Lett. 76 (2000) 109
18. Vorobyova A.I., and Outkina E.A. Thin Solid Films 324 (1998) 1
19. Werder D.J., and Kola R.R. Thin Solid Films 323 (1998) 6
20. Surganov V., Mozalov A., and Lastochkina L. J. Appl. Spectrosc. 65 (1998) 850