Nanoimprinting using Ni molds prepared from highly ordered anodic porous alumina templates

Japanese Journal of Applied Physics, Part 2: Letters

Volumn 45, Issue 29-32, 2006, Pages

  Yanagishita, Takashi ^a   Nishio, Kazuyuki ^a,b   Masuda, Hideki ^a,b  

^a KANAGAWA ACADEMY OF SCIENCE AND TECHNOLOGY   (Japan)

^b TOKYO METROPOLITAN UNIVERSITY   (Japan)

Author keywords

Anodic porous alumina; Nanohole array; Nanoimprint; Ni mold; Template

Indexed keywords

ALUMINA; NANOSTRUCTURED MATERIALS; NICKEL; PHOTOPOLYMERIZATION; POROUS MATERIALS;

ANODIC POROUS ALUMINA; GEOMETRICAL STRUCTURE; NANOHOLE ARRAYS; NANOIMPRINTING;

MOLDS;

EID: 34248557613     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.45.L804     Document Type: Article

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