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Volumn 6464, Issue , 2007, Pages

Fabrication of comb-drive micro-actuators based on UV lithography of SU-8 and electroless plating technique

Author keywords

Comb drive; Electroless plating; Metallization; Microactuators; Polymer based

Indexed keywords

COMB DRIVES; FABRICATION TECHNOLOGY; POLYMER BASED; UV LITHOGRAPHY;

EID: 34248551442     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.705333     Document Type: Conference Paper
Times cited : (1)

References (11)
  • 1
    • 0032022531 scopus 로고    scopus 로고
    • Optimal shape design of an electrostatic comb drive microelectromechanical systems
    • Ye W., "Optimal shape design of an electrostatic comb drive microelectromechanical systems", Journal of Microelectromechanical Systems, Vol. 7, No. 1, pp. 16-26, 1998
    • (1998) Journal of Microelectromechanical Systems , vol.7 , Issue.1 , pp. 16-26
    • Ye, W.1
  • 2
    • 0036544046 scopus 로고    scopus 로고
    • Innovative concept for the fabrication of micromechanical sensor and actuator devices using selectively metallized polymers
    • Eberhardt W., et al., "Innovative concept for the fabrication of micromechanical sensor and actuator devices using selectively metallized polymers", Sensors and Actuators A, Vol. 97-98, pp. 473-477, 2002
    • (2002) Sensors and Actuators A , vol.97-98 , pp. 473-477
    • Eberhardt, W.1
  • 3
    • 0038015840 scopus 로고    scopus 로고
    • Fabrication of high-aspect-ratio polymer-based electrostatic comb drives using the hot embossing technique
    • Zhao Y. and Cui T., "Fabrication of high-aspect-ratio polymer-based electrostatic comb drives using the hot embossing technique", Journal of Micromechanics and Microengineering, Vol. 13, pp. 430-435, 2003
    • (2003) Journal of Micromechanics and Microengineering , vol.13 , pp. 430-435
    • Zhao, Y.1    Cui, T.2
  • 5
    • 0042040752 scopus 로고    scopus 로고
    • SU-8 as a material for integrated all-optical microwave filters
    • Curtis P., Iezekiel S., Miles R.E., and Pescod C.R., "SU-8 as a material for integrated all-optical microwave filters", Microwave Engineering, Vol. 39, pp. 51-54, 2001.
    • (2001) Microwave Engineering , vol.39 , pp. 51-54
    • Curtis, P.1    Iezekiel, S.2    Miles, R.E.3    Pescod, C.R.4
  • 6
    • 0032098165 scopus 로고    scopus 로고
    • High frequency transmission line using micromachined polymer dielectric
    • Thorpe J., Steenson D., and Miles R., "High frequency transmission line using micromachined polymer dielectric", Electron. Letters, Vol. 34, pp. 1237-1238, 1998.
    • (1998) Electron. Letters , vol.34 , pp. 1237-1238
    • Thorpe, J.1    Steenson, D.2    Miles, R.3
  • 7
    • 34248514897 scopus 로고    scopus 로고
    • Design and fabrication of a SU-8 based electrostatic microactuator
    • to appear in
    • Dai W., Wang W., and Lian K., "Design and fabrication of a SU-8 based electrostatic microactuator", to appear in Microsystem Technologies, 2006.
    • (2006) Microsystem Technologies
    • Dai, W.1    Wang, W.2    Lian, K.3
  • 10
    • 0035922518 scopus 로고    scopus 로고
    • Selective deposition of metals on plastics used in the construction of microanalytical devices: Photo-directed formation of metal features on PMMA
    • Henry A.C. and McCarley R.L., "Selective deposition of metals on plastics used in the construction of microanalytical devices: Photo-directed formation of metal features on PMMA", Journal of Physical Chemistry. B, Vol. 105, pp. 8755-8761, 2001.
    • (2001) Journal of Physical Chemistry. B , vol.105 , pp. 8755-8761
    • Henry, A.C.1    McCarley, R.L.2
  • 11
    • 34248542890 scopus 로고    scopus 로고
    • Selective metallization of cured SU-8 microstructures using electroless plating method
    • to appear in
    • Dai W. and Wang W., "Selective metallization of cured SU-8 microstructures using electroless plating method", to appear in Sensors and actuators, 2006.
    • (2006) Sensors and actuators
    • Dai, W.1    Wang, W.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.