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Volumn 363-365, Issue 1-3, 2007, Pages 933-937
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Effects of helium implantation on hydrogen isotope retention behavior in SiC
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Author keywords
Hydrogen retention; Hydrogen trapping; Silicon carbide; Thermal desorption; XPS
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Indexed keywords
DEUTERIUM;
HELIUM;
HYDROGEN;
SILICON CARBIDE;
THERMAL DESORPTION;
X RAY PHOTOELECTRON SPECTROSCOPY;
BLISTERS;
HELIUM IMPLANTATION;
HYDROGEN RETENTION;
HYDROGEN TRAPPING;
TRAPPING EFFICIENCY;
ION IMPLANTATION;
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EID: 34248524332
PISSN: 00223115
EISSN: None
Source Type: Journal
DOI: 10.1016/j.jnucmat.2007.01.282 Document Type: Article |
Times cited : (10)
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References (15)
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