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Volumn 313-316, Issue SUPPL., 2003, Pages 408-412

Blister formation and erosion due to blister fracture of SiC or Si

Author keywords

Blister fracture; Helium; Plasma wall interaction; Silicon; Silicon carbide

Indexed keywords

ANNEALING; EROSION; IRRADIATION; SILICON CARBIDE; SILICON WAFERS; SURFACE ROUGHNESS;

EID: 17144457070     PISSN: 00223115     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-3115(02)01400-9     Document Type: Conference Paper
Times cited : (10)

References (21)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.