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Volumn 279, Issue 2-3, 2000, Pages 351-355

Comparison of the chemical erosion of Si, C and SiC under deuterium ion bombardment

Author keywords

[No Author keywords available]

Indexed keywords

BINDING ENERGY; CARBON; CHEMICAL REACTIONS; DEUTERIUM; GRAPHITE; HIGH TEMPERATURE OPERATIONS; HYDROCARBONS; MASS SPECTROMETRY; SILANES; SILICON; SILICON CARBIDE;

EID: 0034207744     PISSN: 00223115     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-3115(00)00032-5     Document Type: Article
Times cited : (20)

References (27)
  • 12
    • 0343737799 scopus 로고    scopus 로고
    • In: Proceedings of the 14th International Conference on Plasma Surface Interactions
    • Rosenheim, Germany, May
    • V. Rohde, H. Maier, K. Krieger, R. Neu, J. Perchermaier, in: Proceedings of the 14th International Conference on Plasma Surface Interactions, Rosenheim, Germany, May 2000, to be published in J. Nucl. Mater. (2001).
    • (2000) To Be Published in J. Nucl. Mater.
    • Rohde, V.1    Maier, H.2    Krieger, K.3    Neu, R.4    Perchermaier, J.5
  • 27
    • 0343302265 scopus 로고    scopus 로고
    • In: Proceedings of the 14th International Conference on Plasma Surface Interactions
    • Rosenheim, Germany, May
    • M. Balden, S. Picarle, J. Roth, in: Proceedings of the 14th International Conference on Plasma Surface Interactions, Rosenheim, Germany, May 2000, to be published in J. Nucl. Mater. (2001).
    • (2000) To Be Published in J. Nucl. Mater.
    • Balden, M.1    Picarle, S.2    Roth, J.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.