Enhancing silicon cutting performance by shaping the focused beam

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6458, Issue , 2007, Pages

  Migliore, Leonard ^a  

^a Research and Development Department   (United States)

Author keywords

Elliptical beam; Fracture strength; Laser cutting; Silicon

Indexed keywords

ELLIPTICAL BEAM; LASER CUTTING; MECHANICAL CUTTING;

DIELECTRIC PROPERTIES; FOCUSING; FRACTURE TOUGHNESS; LASER BEAM CUTTING; NEODYMIUM LASERS; SILICON WAFERS;

SILICON;

EID: 34248403366     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.708642     Document Type: Conference Paper

References (9)

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